Microelectronic structure including air gap
A microelectronic structure and a method for fabricating the microelectronic structure provide a plurality of voids interposed between a plurality of conductor layers. The plurality of voids is also located between a liner layer and an inter-level dielectric layer. The voids provide for enhanced electrical performance of the microelectronic structure.
1. A microelectronic structure comprising:
a first dielectric layer located over a substrate;
a plurality of conductor layers located embedded and planarized within the first dielectric layer and including a plurality of apertures interposed between the plurality of conductor layers;
a plurality of barrier layers located upon bottom and sidewall portions of the plurality of conductor layers;
a plurality of capping layers aligned upon top surfaces of the plurality of conductor layers;
a plurality of spacers adjoining a sidewall of the plurality of capping layers and having a thickness less than or equal to a width of the barrier layer;
a liner layer incompletely filling the plurality of apertures; and
a second dielectric layer located upon the liner layer and enclosing a plurality of voids interposed between the liner layer and the second dielectric layer, and separating the plurality of conductor layers.
2. The structure of claim 1 wherein the substrate comprises a bulk semiconductor substrate.
3. The structure of claim 1 wherein the substrate comprises a semiconductor-on-insulator substrate.
4. The structure of claim 1 wherein the substrate comprises a hybrid orientation substrate.
5. The structure of claim 1 wherein the plurality of voids extends within the dielectric layer deeper than the plurality of conductor layers.
6. The structure of claim 1 wherein the plurality of voids undercuts the plurality of conductor layers.
7. The structure of claim 1 wherein said first dielectric layer comprises a dielectric material having a dielectric constant of greater than 4.0.
8. The structure of claim 1 wherein said first dielectric layer comprises a dielectric material having a dielectric constant of less than 4.0.
9. The structure of claim 1 wherein said plurality of conductor layers comprise copper or a copper alloy.
10. The structure of claim 1 wherein said second dielectric layer comprises a dielectric material having a dielectric constant of greater than 4.0.
11. The structure of claim 1 wherein said second dielectric layer comprises a dielectric material having a dielectric constant of less than 4.0.
12. The structure of claim 1 wherein said a plurality of voids are enclosed by a dielectric liner material.
13. The structure of claim 12 wherein said dielectric liner material comprises silicon nitride.
14. The structure of claim 12 wherein said dielectric liner material comprises carbon doped silicon nitride.
15. The structure of claim 12 wherein said plurality of voids having an uppermost portion that extends above an uppermost surface of said dielectric liner material.