Metal-strapped CCD image sensors
View Patent ↗In various embodiments, image sensors include strapping grids of vertical and horizontal strapping lines conducting phase-control signals to underlying gate conductors that control transfer of charge within the image sensor.
1. An image sensor comprising:
an imaging array of photosensitive regions arranged in columns, the imaging array having a top side, a right side, a bottom side, and a left side;
a plurality of vertical charge coupled devices (VCCDs) each associated with a column of the photosensitive regions;
a horizontal CCD for receiving charge from the plurality of VCCDs;
disposed over the plurality of VCCDs, a plurality of groups of gate conductors for controlling transfer of charge within the plurality of VCCDs, each group being responsive to a different phase-control signal, and each gate conductor having a first resistivity;
a plurality of bus lines, each bus line conducting a different phase-control signal to a different group of gate conductors and extending along two or more adjacent sides of the imaging array;
disposed over the plurality of gate conductors in a first direction, a plurality of vertical strapping lines each (i) electrically connected to one of the bus lines on a first side of the imaging array and (ii) having a second resistivity less than the first resistivity;
extending over the plurality of gate conductors in a second direction not parallel to the first direction, a plurality of horizontal strapping lines each (i) electrically connected to one of the bus lines on a second side of the imaging array and (ii) having a third resistivity less than the first resistivity; and
a plurality of contacts each electrically connecting a vertical strapping line to a horizontal strapping line to form a plurality of strapping grids each (i) comprising one or more vertical strapping lines and one or more horizontal strapping lines, (ii) electrically connected to a different bus line, and (iii) electrically connected to a different group of gate conductors.
2. The image sensor of claim 1 , wherein each of the gate conductors comprises polysilicon.
3. The image sensor of claim 1 , wherein each of the vertical strapping lines comprises a metal.
4. The image sensor of claim 1 , wherein each of the horizontal strapping lines comprises a metal.
5. The image sensor of claim 1 , wherein the plurality of vertical strapping lines and the plurality of horizontal strapping lines collectively define a plurality of apertures, each photosensitive region being disposed within an aperture.
6. The image sensor of claim 1 , wherein each of the photosensitive regions comprises a photodiode, a photo detector, a photo capacitor, or a photo conductor.
7. The image sensor of claim 1 , wherein each of the vertical strapping lines and each of the horizontal strapping lines are substantially opaque.
8. The image sensor of claim 1 , wherein the plurality of horizontal strapping lines are disposed over the plurality of vertical strapping lines.
9. An image sensor comprising:
an imaging array of photosensitive regions arranged in columns, the imaging array having a top side, a right side, a bottom side, and a left side;
a plurality of vertical charge coupled devices (VCCDs) each associated with a column of the photosensitive regions;
a horizontal CCD for receiving charge from the plurality of VCCDs;
disposed over the plurality of VCCDs, a plurality of groups of gate conductors for controlling transfer of charge within the plurality of VCCDs, each group being responsive to a different phase-control signal, and each gate conductor having a first resistivity;
a plurality of bus lines, each bus line conducting a different phase-control signal and extending along two or more adjacent sides of the imaging array;
a plurality of vertical strapping lines each electrically connected to a corresponding one of the plurality of bus lines on a first side of the imaging array;
a plurality of horizontal strapping lines each electrically connected to a corresponding one of the plurality of bus lines on a second side of the imaging array; and
a plurality of contacts each electrically connecting a vertical strapping line to a horizontal strapping line to form a plurality of strapping grids and electrically connected to a different group of gate conductors.
10. The image sensor of claim 9 , wherein each of the plurality of horizontal strapping lines and each of the plurality of vertical strapping lines are made of a material having a lower resistivity than a resistivity of the gate conductor.
11. The image sensor of claim 10 , wherein each of the gate conductors comprises polysilicon.
12. The image sensor of claim 10 , wherein each of the vertical strapping lines comprises a metal.
13. The image sensor of claim 10 , wherein each of the horizontal strapping lines comprises a metal.
14. The image sensor of claim 9 , wherein the plurality of vertical strapping lines and the plurality of horizontal strapping lines collectively define a plurality of apertures, wherein each photosensitive region is disposed within an aperture.
15. The image sensor of claim 9 , wherein each photosensitive region comprises a photodiode, a photo detector, a photo capacitor, or a photo conductor.
16. The image sensor of claim 9 , wherein each of the vertical strapping lines and each of the horizontal strapping lines are substantially opaque.
17. The image sensor of claim 9 , wherein the plurality of horizontal strapping lines are disposed over the plurality of vertical strapping lines.
18. An image sensor comprising:
an imaging array of photosensitive regions arranged in columns, the imaging array having a top side, a right side, a bottom side, and a left side;
a plurality of vertical charge coupled devices (VCCDs) each associated with a column of the photosensitive regions;
a horizontal CCD for receiving charge from the plurality of VCCDs;
a plurality of bus lines, each bus line conducting a different phase-control signal associated with the plurality of VCCDs and extending along two or more adjacent sides of the imaging array; and
a grid of strapping lines over the imaging array comprising a plurality of vertical strapping lines each electrically connected to a corresponding one of the plurality of bus lines on a first side of the imaging array, and a plurality of horizontal strapping lines each electrically connected to a corresponding one of the plurality of bus lines on a second side of the imaging array, wherein the plurality of horizontal strapping lines is coupled to respective ones of the plurality of vertical strapping lines to form a strapping grid for an associated phase control-signal.
19. The image sensor of claim 18 , wherein each of the vertical strapping lines and each of the horizontal strapping lines each comprises a metal.
20. The image sensor of claim 18 , wherein the plurality of horizontal strapping lines are disposed over the plurality of vertical strapping lines.