Laser doping of crystalline semiconductors using a dopant-containing amorphous silicon stack for dopant source and passivation
View Patent ↗Techniques and structures for laser doping of crystalline semiconductors using a dopant-containing amorphous silicon stack for dopant source and passivation. A structure includes a crystalline semiconductor having at least one surface, a doped crystalline region disposed in at least one selected area of the semiconductor surface, and a dopant-containing amorphous silicon layer stack containing a same dopant as present in the doped crystalline region on at least a portion of the semiconductor surface outside the selected area, wherein the dopant-containing amorphous silicon layer stack passivates the portion of the semiconductor surface on which it is disposed.
1. A structure, comprising:
a crystalline semiconductor having at least one surface;
a doped crystalline region disposed in at least one selected area of the semiconductor surface;
a dopant-containing amorphous silicon layer stack containing a same dopant as present in the doped crystalline region on at least a portion of the semiconductor surface outside the selected area, wherein the dopant-containing amorphous silicon layer stack passivates the portion of the semiconductor surface on which it is disposed; and
a patterned overlayer stack disposed on the dopant-containing amorphous silicon layer stack, wherein the patterned overlayer stack is patterned with at least one opening over the doped crystalline region to physically expose one or more portions of the doped crystalline region to an outside environment.
2. The structure of claim 1 , further comprising:
a blanket layer of a metallic conductor disposed on the dopant-containing amorphous silicon layer stack and the doped crystalline region.
3. The structure of claim 2 , wherein the structure comprises one face of a solar cell structure.
4. The structure of claim 1 , further comprising:
a blanket layer of a transparent conductor disposed on the dopant-containing amorphous silicon layer stack and the doped crystalline region; and
a metallic conductor layer disposed on the blanket layer of transparent conductor wherein the metallic conductor layer has a grid pattern or a blanket pattern.
5. The structure of claim 4 , wherein the structure comprises one face of a solar cell structure.
6. The structure of claim 1 , further comprising:
a metallic conductor layer disposed over said patterned overlayer stack and doped crystalline region.
7. The structure of claim 6 , wherein the overlayer stack comprises at least one of a single or multilayer dielectric coating, a back reflector, a diffusion barrier, a transparent conductor, and a metallic conductor.
8. The structure of claim 6 , wherein the structure comprises one face of a solar cell structure.
9. The structure of claim 1 , wherein the dopant-containing amorphous silicon layer stack comprises an i-aSiH-bottom/doped-aSiH-top layer on the at least one surface of the crystalline semiconductor layer.
10. The structure of claim 1 , wherein the dopant-containing amorphous silicon layer stack comprises (i) a lower layer of undoped amorphous silicon providing a passivating function and (ii) an upper layer of doped amorphous silicon providing a dopant source function.
11. The structure of claim 10 , wherein the layer of undoped amorphous silicon and/or the layer of doped amorphous silicon comprise one of (i) a-SiH, (ii) a-Si(Ge)H, (iii) a-Ge(Si)H, and (iv) a-GeH.
12. The structure of claim 11 , wherein H content varies from approximately 5% to approximately 50% atomic percent.
13. The structure of claim 10 , wherein the layer of undoped amorphous silicon and/or the layer of doped amorphous silicon further comprises carbon (C) and/or a dopant selected from a group including boron (B), phosphorous (P), arsenic (As), antimony (Sb), nitrogen (N), gallium (Ga), indium (In), and aluminum (Al).