Catalytic etch with magnetic direction control
View Patent ↗A material can be locally etched with arbitrary changes in the direction of the etch. A ferromagnetic-material-including catalytic particle is employed to etch the material. A wet etch chemical or a plasma condition can be employed in conjunction with the ferromagnetic-material-including catalytic particle to etch a material through a catalytic reaction between the catalytic particle and the material. During a catalytic etch process, a magnetic field is applied to the ferromagnetic-material-including catalytic particle to direct the movement of the particle to any direction, which is chosen so as to form a contiguous cavity having at least two cavity portions having different directions. The direction of the magnetic field can be controlled so as to form the contiguous cavity in a preplanned pattern, and each segment of the contiguous cavity can extend along an arbitrary direction.
1. A method of etching a material, said method comprising:
disposing at least one ferromagnetic-material-including catalytic particle on a material;
performing a catalytic etch process on said material by activating said at least one ferromagnetic-material-including catalytic particle with a chemical or a plasma; and
changing a direction of propagation of said at least one ferromagnetic-material-including catalytic particle during said catalytic etch process by changing a direction of a gradient of a magnetic field applied to said at least one ferromagnetic-material-including catalytic particle, wherein said magnetic field is generated by a first x-axis magnet and a second x-axis magnet on opposing sides of said material in the x-direction, a first y-axis magnet and a second y-axis magnet on opposing sides of said material in the y-direction, and a first z-axis magnet and a second z-axis magnet on opposing sides of said material in the z-direction.
2. The method of claim 1 , wherein said direction of propagation of said at least one ferromagnetic-material-including catalytic particle is controlled to form a contiguous cavity including at least a first cavity portion extending along a first direction and a second cavity portion extending along a second direction, wherein said first direction and said second direction are different.
3. The method of claim 2 , wherein said contiguous cavity includes a section in which a propagation direction of said contiguous cavity changes continuously.
4. The method of claim 2 , wherein said contiguous cavity includes a third cavity portion extending along a third direction, wherein said first direction, said second direction, and said third direction are not within a same two-dimensional plane.
5. The method of claim 1 , wherein said at least one ferromagnetic-material-including catalytic particle comprises:
a ferromagnetic material core; and
a surface coating over said ferromagnetic material core, said surface coating comprising a catalytic material that functions as a catalyst for said catalytic etch process.
6. The method of claim 1 , wherein said at least one ferromagnetic-material-including catalytic particle consists of a ferromagnetic material that is a catalytic material that functions as a catalyst for said catalytic etch process.
7. The method of claim 1 , wherein said catalytic etch process is a wet etch process employing a wet etch solution, wherein a surface of said at least one ferromagnetic-material-including catalytic particle is activated by said wet etch solution to etch said material.
8. The method of claim 1 , wherein said catalytic etch process is a plasma etch process employing a plasma, wherein a surface of said at least one ferromagnetic-material-including catalytic particle is activated by said plasma to etch said material.
9. A system for catalytically etching a material, said system comprising an apparatus containing:
an etch chamber configured to perform a catalytic etch process of a material by activating at least one ferromagnetic-material-including catalytic particle; and
a magnetic field generating apparatus comprising a first x-axis magnet and a second x-axis magnet and on opposing sides of said etch chamber in the x-direction, a first y-axis magnet and a second y-axis magnet on opposing sides of said etch chamber in the y-direction, and a first z-axis magnet and a second z-axis magnet on opposing sides of said etch chamber in the z-direction, wherein said magnets are configured to apply a non-uniform magnetic field to said at least one ferromagnetic-material-including catalytic particle within said etch chamber along at least three directions that are not within a same two-dimensional plane.
10. The system of claim 9 , wherein said magnetic field generating apparatus is configured to contiguously change a direction of said magnetic field during operation of said catalytic etch process.
11. The system of claim 9 , wherein said magnetic field generating apparatus is configured to align said magnetic field along an arbitrary spatial orientation within a three-dimensional polar coordinate system.
12. The system of claim 9 , wherein said catalytic etch process is a wet etch process employing a wet etch solution, wherein a surface of said at least one ferromagnetic-material-including catalytic particle is activated by said wet etch solution to etch said material.
13. The system of claim 9 , wherein said catalytic etch process is a plasma etch process employing a plasma, wherein a surface of said at least one ferromagnetic-material-including catalytic particle is activated by said plasma to etch said material.