Buried waveguide photodetector
A method of forming an integrated photonic semiconductor structure having a photodetector and a CMOS device may include forming the CMOS device on a first silicon-on-insulator region, forming a silicon optical waveguide on a second silicon-on-insulator region, and forming a shallow trench isolation (STI) region surrounding the silicon optical waveguide such that the shallow trench isolation electrically isolating the first and second silicon-on-insulator region. Within a first region of the STI region, a first germanium material is deposited adjacent a first side wall of the semiconductor optical waveguide. Within a second region of the STI region, a second germanium material is deposited adjacent a second side wall of the semiconductor optical waveguide, whereby the second side wall opposes the first side wall. The first and second germanium material form an active region that evanescently receives propagating optical signals from the first and second side wall of the semiconductor optical waveguide.
1. A method of forming an integrated photonic semiconductor structure having a photodetector device and a CMOS device comprising:
forming a well region for the CMOS device;
forming an isolation region for electrically isolating the photodetector device from the well region;
forming a semiconductor optical waveguide for propagating optical signals;
depositing, within the isolation region, germanium material adjacent to a first portion of opposing side walls of the semiconductor optical waveguide, the first portion of the opposing sidewalls being substantially parallel with a travel direction of the propagating optical signals within the optical waveguide; and
depositing an oxide liner within the isolation region prior to the depositing of the germanium material, wherein the oxide liner separates the first portion of the opposing side walls of the semiconductor optical waveguide from the adjacent deposited germanium material,
wherein the deposited germanium material forms an active region of the photodetector device for evanescently receiving the propagating optical signals from the first portion of the opposing sidewalls of the semiconductor optical waveguide structure.
2. The method of claim 1 , further comprising:
performing a thermal anneal process for simultaneously initiating activating well dopants within the well region and crystallizing the deposited germanium material that forms the active region.
3. The method of claim 2 , wherein the thermal anneal process comprises heating the integrated photonic semiconductor structure to a temperature of about 1030° C. for a period of about 5 seconds.
4. The method of claim of claim 1 , further comprising:
depositing an insulating oxide fill material over a second portion of the opposing side walls of the semiconductor optical waveguide, wherein the semiconductor optical waveguide comprises a core region and the insulating oxide fill material deposited over the second portion of opposing side walls comprises a cladding.
5. The method of claim 4 , wherein the insulating oxide fill material comprises a silicon dioxide (SiO 2 ) material.
6. The method of claim 1 , wherein the deposited germanium material comprises a thickness of about 50-200 nm.
7. The method of claim 1 , wherein the depositing of the germanium material adjacent to the first portion of the opposing side walls comprises utilizing one of a physical vapor deposition (PVD) process, a plasma enhanced chemical vapor deposition (PECVD) process, a rapid thermal chemical vapor deposition (RTCVD) process, and a reduced pressure chemical vapor deposition (RPCVD) process.
8. The method of claim 1 , wherein the oxide liner comprises a thickness of about 20-40 nm.
9. The method of claim 1 , wherein the isolation region comprises a shallow trench isolation (STI) region.
10. The method of claim 1 , wherein the semiconductor optical waveguide is formed from a silicon-on-insulator (SOI) layer located over a buried oxide (BOX) layer.
11. The method of claim 1 , wherein the CMOS device comprises an FET.
12. A method of forming an integrated photonic semiconductor structure having a photodetector device and a CMOS device comprising:
forming the CMOS device on a first silicon-on-insulator region;
forming a silicon optical waveguide on a second silicon-on-insulator region;
forming a shallow trench isolation region surrounding the silicon optical waveguide, the shallow trench isolation electrically isolating the first and the second silicon-on-insulator region;
depositing, within a first region of the shallow trench isolation region, first germanium material adjacent a first side wall of the semiconductor optical waveguide; and
depositing, within a second region of the shallow trench isolation region, second germanium material adjacent a second side wall of the semiconductor optical waveguide, the second side wall opposing the first side wall;
wherein the deposited first and the deposited second germanium material form an active region of the photodetector device for evanescently receiving propagating optical signals from the first and the second side wall of the semiconductor optical waveguide.
13. The method of claim 12 , wherein the deposited first and the deposited second germanium material are respectively separated from the first and the second side wall of the semiconductor optical waveguide by an oxide liner.
14. The method of claim 13 , wherein the oxide liner comprises an oxide layer having a thickness of about 20-40 nm.
15. The method of claim 12 , wherein the shallow trench isolation region comprises a silicon dioxide (SiO 2 ) fill material.
16. The method of claim 12 , wherein the deposited first and the deposited second germanium material each comprises a thickness of about 50-200 nm.