Structure and method to fabricate a body contact
View Patent ↗A structure and method to fabricate a body contact on a transistor is disclosed. The method comprises forming a semiconductor structure with a transistor on a handle wafer. The structure is then inverted, and the handle wafer is removed. A silicided body contact is then formed on the transistor in the inverted position. The body contact may be connected to neighboring vias to connect the body contact to other structures or levels to form an integrated circuit.
1. A semiconductor structure comprising: a dielectric layer; a transistor, the transistor comprising a body, source, drain, and gate, wherein the transistor is disposed on the dielectric layer; a void formed in the dielectric layer, thereby exposing the body of the transistor, wherein the body is disposed adjacent to the source, drain, and gate;
a silicide layer disposed in the void formed in the dielectric layer, and on the body of the transistor;
a polysilicon layer disposed on the silicide layer; and
a metal liner disposed on the silicide layer, such that the metal liner is between the silicide layer and the polysilicon layer.
2. The semiconductor structure of claim 1 , further comprising: at least one metal contact; at least one via; at least one active silicon area connected to a metal contact by a via; wherein a second void is formed in the dielectric layer, thereby exposing the at least one active silicon area; and wherein the silicide layer is also disposed on the at least one active silicon area.
3. The semiconductor structure of claim 2 , further comprising a void formed in the polysilicon layer, the void disposed between the body of the transistor, and the at least one active silicon area connected to a metal contact by a via.
4. The semiconductor structure of claim 1 , wherein the silicide layer comprises nickel silicide.
5. The semiconductor structure of claim 1 , wherein the silicide layer comprises cobalt silicide.
6. The semiconductor structure of claim 1 , wherein the metal liner is comprised of copper.
7. The semiconductor structure of claim 1 , wherein the metal liner is comprised of titanium.