Controlled metal extrusion opening in semiconductor structure and method of forming
View Patent ↗Aspects of the present invention relate to a controlled metal extrusion opening in a semiconductor structure. Various embodiments include a semiconductor structure. The structure includes an aluminum layer. The aluminum layer includes an aluminum island within the aluminum layer, and a lateral extrusion receiving opening extending through the aluminum layer adjacent the aluminum island. The opening includes a lateral extrusion of the aluminum layer of the semiconductor structure. Additional embodiments include a method of forming a semiconductor structure. The method can include forming an aluminum layer over a titanium layer. The aluminum layer includes an aluminum island within the aluminum layer. The method can also include forming an opening extending through the aluminum layer adjacent the aluminum island within the aluminum layer. The opening includes a lateral extrusion of the aluminum layer of the semiconductor layer.
1. A method of forming a semiconductor structure, the method comprising:
forming an aluminum layer over a titanium layer, the aluminum layer including an aluminum island within the aluminum layer;
forming a substantially ring-shaped opening extending through the aluminum layer, wherein the substantially ring-shaped opening surrounds the aluminum island within the aluminum layer;
forming an opening extending through the aluminum layer adjacent the aluminum island within the aluminum layer after the forming of the substantially ring-shaped opening; and
annealing the semiconductor structure after the forming of the opening, the annealing causing the aluminum layer to compress and form lateral extrusions extending through the opening, wherein the opening allows for the lateral extrusion during the annealing and prevents lateral extrusion through the substantially ring-shaped opening during the annealing.
2. The method of claim 1 , wherein the forming of the opening includes forming the opening adjacent the substantially ring-shaped opening.
3. The method of claim 1 , wherein the forming of the opening includes forming a portion of the opening within the substantially ring-shaped opening.
4. The method of claim 1 , wherein the forming of the opening includes forming the opening between the aluminum island and the substantially ring-shaped opening.
5. The method of claim 1 , further comprising:
forming a first plurality of vias adjacent the opening that are within the opening and outside the aluminum island; and
forming a second plurality of vias adjacent the aluminum island and inside the aluminum island.
6. The method of claim 5 , wherein the forming of the opening includes forming the opening a predetermined distance from the first and second plurality of vias.
7. The method of claim 1 , wherein the opening is located in a non-active circuit area of the semiconductor structure, and wherein the ring-shaped opening is located in an active circuit area of the semiconductor structure.
8. The method of claim 1 , wherein the opening prevents the lateral extrusion from contacting the active circuit area.
9. The method of claim 1 , wherein the lateral extrusion extends an entire width of the opening.
10. A method of forming a semiconductor structure, the method comprising:
forming an aluminum layer over a titanium layer, the aluminum layer including an aluminum island within the aluminum layer;
forming a substantially ring-shaped opening extending through the aluminum layer, wherein the substantially ring-shaped opening surrounds the aluminum island within the aluminum layer;
forming an opening extending through the aluminum layer adjacent the aluminum island within the aluminum layer, the opening including a lateral extrusion of the aluminum layer of the semiconductor layer, wherein the forming of the opening is performed after the forming of the substantially ring-shaped opening;
forming a first plurality of vias within the opening and outside the aluminum island; and
forming a second plurality of vias adjacent the aluminum island and inside the aluminum island.
11. The method of claim 10 , further comprising annealing the semiconductor structure after the forming of the opening extending through the aluminum layer, the annealing causing the aluminum layer to compress and form lateral extrusions extending through the opening, wherein the opening allows for the lateral extrusion during the annealing and prevents lateral extrusion through the substantially ring-shaped opening during the annealing.
12. The method of claim 11 , wherein the opening is located in a non-active circuit area of the semiconductor structure, and wherein the ring-shaped opening is located in an active circuit area of the semiconductor structure.
13. The method of claim 12 , wherein the opening prevents the lateral extrusion from contacting the active circuit area.
14. The method of claim 12 , wherein the lateral extrusion extends an entire width of the opening.