Method and apparatus for plasma dicing a semi-conductor wafer
View Patent ↗The present invention provides a method for plasma dicing a substrate. The method comprising providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; placing the substrate onto a support film on a frame to form a work piece work piece; loading the work piece onto the work piece support; providing a clamping electrode for electrostatically clamping the work piece to the work piece support; providing a mechanical partition between the plasma source and the work piece; generating a plasma through the plasma source; and etching the work piece through the generated plasma.
1. A method for plasma dicing a substrate, the method comprising:
providing a process chamber having a wall;
providing a plasma source adjacent to the wall of the process chamber;
providing a work piece support within the process chamber;
providing an electrostatic chuck within said work piece support, said electrostatic chuck having a seal band, and at least one clamping electrode;
providing a cover ring;
placing a work piece onto said work piece support, said work piece having a support film, a frame and the substrate;
generating a plasma using the plasma source;
etching said work piece using the generated plasma; and
electrostatically clamping said work piece to said work piece support using said electrostatic clamp during said etching step, said clamping electrode of the electrostatic chuck overlapping any portion of said seal band that is not overlapped by said cover ring during said etching step.
2. The method according to claim 1 further comprising said clamping electrode overlapping a portion of the substrate during said etching step.
3. The method according to claim 1 further comprising said clamping electrode completely overlapping the substrate during said etching step.
4. The method according to claim 1 further comprising an inner diameter of said seal band being larger than an outer diameter of the substrate.
5. The method according to claim 1 wherein the etching step further comprising etching away unprotected areas of the substrate of the work piece through the generated plasma.
6. The method according to claim 1 wherein the etching step further comprising etching partially away unprotected areas of the substrate of the work piece through the generated plasma.
7. A method for plasma dicing a substrate, the method comprising:
providing a process chamber having a wall;
providing a plasma source adjacent to the wall of the process chamber;
providing a work piece support within the process chamber;
providing an electrostatic chuck within said work piece support, said electrostatic chuck having at least one clamping electrode;
providing a cover ring, the clamping electrode overlapping a portion of an unshielded seal band region that is not covered by the cover ring;
placing a work piece onto said work piece support, said work piece having a support film, a frame and the substrate, the support film overlapping the seal band region;
generating a plasma using the plasma source;
etching the work piece using the generated plasma; and
electrostatically clamping said work piece to said work piece support using said electrostatic clamp during said etching step, the clamping electrode of the electrostatic chuck clamping a portion of the support film that is exposed to the generated plasma during said etching step.
8. The method according to claim 7 further comprising said clamping electrode completely overlapping the substrate during said etching step.
9. The method according to claim 7 further comprising a first diameter of said clamping electrode being larger than a second diameter of the substrate.
10. The method according to claim 7 further comprising said clamping electrode extending approximately two millimeters beyond a perimeter of the substrate.
11. The method according to claim 7 further comprising said clamping electrode being RF biased during said etching step.
12. The method according to claim 7 wherein the etching step further comprising etching away unprotected areas of the substrate of the work piece through the generated plasma.
13. The method according to claim 7 wherein the etching step further comprising etching partially away unprotected areas of the substrate of the work piece through the generated plasma.
14. A method for plasma dicing a substrate, the method comprising:
providing a process chamber having a wall;
providing a plasma source adjacent to the wall of the process chamber;
providing a work piece support within the process chamber;
providing an electrostatic chuck within said work piece support, said electrostatic chuck having a seal band, a fluid inlet and at least one clamping electrode;
providing a cover ring;
placing a work piece onto said work piece support, said work piece having a support film, a frame and the substrate;
generating a plasma using the plasma source;
etching the work piece using the generated plasma; and
electrostatically clamping said work piece to said work piece support using said electrostatic clamp during said etching step, said clamping electrode of the electrostatic chuck overlapping a portion of said seal band that is not overlapped by said cover ring during said etching step.
15. The method according to claim 14 further comprising said clamping electrode overlapping a portion of the substrate during said etching step.
16. The method according to claim 14 further comprising said clamping electrode completely overlapping the substrate during said etching step.
17. The method according to claim 14 further comprising said clamping electrode being RF biased during said etching step.
18. The method according to claim 14 further comprising said seal band completely encircling the substrate.
19. The method according to claim 14 further comprising said fluid inlet being positioned outside of a perimeter of the substrate.
20. The method according to claim 14 wherein the etching step further comprising etching away unprotected areas of the substrate of the work piece through the generated plasma.
21. The method according to claim 14 wherein the etching step further comprising etching partially away unprotected areas of the substrate of the work piece through the generated plasma.