Dicing/die bonding integral film, dicing/die bonding integral film manufacturing method, and semiconductor chip manufacturing method
View Patent ↗A dicing/die bonding integral film of the present invention includes a base film, a pressure-sensitive adhesive layer which is formed on the base film and to which a wafer ring for blade dicing is bonded, and a bonding layer formed on the adhesive layer and having a central portion to which a semiconductor wafer to be diced is bonded, wherein a planar shape of the bonding layer is circular, an area of the bonding layer is greater than an area of the semiconductor wafer and smaller than an area of each of the base film and the adhesive layer, and a diameter of the bonding layer is greater than a diameter of the semiconductor wafer and less than an inner diameter of the wafer ring, and a difference in diameter between the bonding layer and the semiconductor wafer is greater than 20 mm and less than 35 mm.
1. A dicing/die bonding integral film, comprising:
a base film;
a pressure-sensitive adhesive layer which is formed on the base film and to which a wafer ring to be used in blade dicing is bonded; and
a bonding layer formed on the adhesive layer and having a central portion to which a semiconductor wafer to be subjected to blade dicing is bonded,
wherein a planar shape of the bonding layer is circular,
an area of the bonding layer is greater than an area of the semiconductor wafer and smaller than an area of each of the base film and the adhesive layer, and
a diameter of the bonding layer is greater than a diameter of the semiconductor wafer and less than an inner diameter of the wafer ring, and a difference in diameter between the bonding layer and the semiconductor wafer is greater than 20 mm, such that cutting water, sprayed onto a dicing blade during blade dicing the semiconductor wafer, is prevented from directly contacting a peripheral edge of the bonding layer, and less than 35 mm.
2. A dicing/die bonding integral film manufacturing method, comprising:
a dicing film preparation step of preparing a dicing film in which an adhesive layer is formed on a base film;
a die bonding film preparation step of preparing a die bonding film in which a bonding layer is formed on a peelable base;
a bonding layer cutting step of cutting the bonding layer into a circular shape such that an area of the bonding layer is greater than an area of a semiconductor wafer bonded to a central portion of the bonding layer and is smaller than an area of each of the adhesive layer and the base film; and
a film bonding step of bonding a side of the dicing film, at which the adhesive layer is formed, to the peelable base of the die-bonding film and the bonding layer cut into the circular shape,
wherein, in the bonding layer cutting step,
the bonding layer is cut such that a diameter of the bonding layer is greater than a diameter of the semiconductor wafer and less than an inner diameter of a wafer ring to be used in blade dicing, and a difference in diameter between the bonding layer and the semiconductor wafer is greater than 20 mm, such that cutting water, sprayed onto a dicing blade during blade dicing the semiconductor wafer, is prevented from directly contacting a peripheral edge of the bonding layer, and less than 35 mm.
3. The dicing/die bonding integral film manufacturing method of claim 2 , wherein, in the dicing film preparation step, a dicing film in which a pressure-sensitive adhesive layer is formed on a base film is prepared.
4. A semiconductor chip manufacturing method, comprising:
a semiconductor wafer bonding step of bonding a semiconductor wafer to a bonding layer of a dicing/die bonding integral film in which an adhesive layer is formed on a base film and the bonding layer is formed on the adhesive layer, such that a peripheral edge of the bonding layer exudes out from around the entire semiconductor wafer by 10 mm or more, so that cutting water, sprayed onto a blade during dicing the semiconductor wafer, is prevented from directly contacting the peripheral edge of the bonding layer;
a wafer ring bonding step of bonding a wafer ring to the adhesive layer outside the peripheral edge of the bonding layer; and
a chip obtaining step of obtaining a plurality of semiconductor chips which are individually divided by dicing the semiconductor wafer with the blade.
5. The dicing/die bonding integral film according to claim 1 , wherein the difference in diameter between the bonding layer and the semiconductor wafer is less than 35 mm so that the bonding layer can be contained within a hole in the wafer ring.
6. The dicing/die bonding integral film according to claim 1 , wherein the base film has a diameter greater than the inner diameter of the wafer ring.
7. The dicing/die bonding integral film according to claim 1 , wherein the inner diameter of the wafer ring is greater than the diameter of the semiconductor wafer by at least 45 mm.
8. The dicing/die bonding integral film manufacturing method according to claim 2 , wherein the difference in diameter between the bonding layer and the semiconductor wafer is less than 35 mm so that the bonding layer can be contained within a hole in the wafer ring.
9. The dicing/die bonding integral film manufacturing method according to claim 2 , wherein the base film has a diameter greater than the inner diameter of the wafer ring.
10. The dicing/die bonding integral film manufacturing method according to claim 2 , wherein the inner diameter of the wafer ring is greater than the diameter of the semiconductor wafer by at least 45 mm.