FinFET structures having silicon germanium and silicon fins
View Patent ↗A finned structure is fabricated using a bulk silicon substrate having a carbon doped epitaxial silicon layer. A pFET region of the structure includes silicon germanium fins. Such fins are formed by annealing the structure to mix a germanium containing layer with an adjoining crystalline silicon layer. The structure further includes an nFET region including silicon fins formed from the crystalline silicon layer. The germanium containing layer in the nFET region is removed to create a space beneath the crystalline silicon layer in the nFET region. An insulating material is provided within the space. The pFET and nFET regions are electrically isolated by a shallow trench isolation region.
1. A method comprising:
obtaining a structure comprising a bulk silicon substrate, an epitaxial layer comprising carbon doped silicon on the substrate, an epitaxial layer containing germanium on the carbon doped silicon layer, and a layer comprising crystalline silicon on the epitaxial layer containing germanium;
forming an isolation region on the structure electrically isolating a first region of the structure from a second region of the structure;
removing the epitaxial layer containing germanium from the second region of the structure, thereby forming a space within the second region beneath the layer comprising crystalline silicon;
forming an insulating layer within the space;
thermally mixing the epitaxial layer containing germanium and the layer comprising crystalline silicon in the first region of the structure to form a layer comprising silicon germanium;
forming a plurality of fins comprising silicon germanium in the first region from the silicon germanium layer, and
forming a second plurality of fins from the layer comprising crystalline silicon in the second region.
2. The method of claim 1 , wherein the layer comprising crystalline silicon has a thickness of fifty nanometers or less.
3. The method of claim 2 , wherein the epitaxial layer containing germanium comprises silicon germanium.
4. The method of claim 3 , wherein the step of forming the insulating layer within the space includes filling the space with an oxide material.
5. The method of claim 3 , wherein the epitaxial layer containing germanium comprises 20-80% germanium.
6. The method of claim 5 , wherein the epitaxial layer containing germanium has a thickness between five and twenty nanometers.
7. The method of claim 1 , further including the step of forming gate structures on the structure.
8. The method of claim 1 , further including the step of forming a p-type FinFET device in the first region using the silicon germanium fins.
9. The method of claim 8 , further including the step of forming a n-type FinFET device in the second region using the fins formed from the layer comprising crystalline silicon.
10. The method of claim 9 , wherein the step of removing the epitaxial layer containing germanium from the second region of the structure includes forming a trench through the layer comprising crystalline silicon and etching the epitaxial layer containing germanium.