IP Library Granted Patent US 9,094,135
Granted Patent B2
US 9,094,135 · App. 13/914,021 · Granted Jul 28, 2015

Die stack with optical TSVs

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Quick Facts
Patent No.
US 9,094,135
App. No.
13/914,021
Granted
Jul 28, 2015
Kind
B2
Abstract

A high density, low power, high performance information system, method and apparatus are described in which a laser source ( 213 ) on a first die ( 210 ) generates a source light beam of unmodulated monochromatic coherent light ( 281 ) for distribution via optical beam routing structures (e.g., 214/214 a, 224/224 a, 234/234 a ) to a plurality of receiving die ( 220, 230 ), each of which includes its own modulator (e.g., 223, 233 ) for optically receiving at least a portion of the source light beam ( 281 a, 281 b ) from the first die and generating therefrom an output source light beam of modulated monochromatic coherent light ( 291, 292 ) which is encoded at said modulator in response to electrical signal information.

Claims (42)

1. An apparatus comprising:

a first die comprising:

a laser source for generating a source unmodulated optical beam, and

one or more first optical beam routing structures for optically transmitting the source unmodulated optical beam through the first die; and

at least one receiving die comprising:

one or more second optical beam routing structures for optically receiving at least a portion of the source unmodulated optical beam from the one or more first optical beam routing structures,

a modulator for generating an output modulated optical beam which is encoded at said modulator in response to electrical signal information, and

one or more third optical beam routing structures for optically transmitting the output modulated optical beam signal through the receiving die.

2. The apparatus of claim 1 , where the first die comprises a processor die, and where the receiving die comprises a memory die.

3. The apparatus of claim 1 , where the first die and receiving die are attached together in a die stack module.

4. The apparatus of claim 3 , where the one or more first optical beam routing structures comprise:

a first optical beam waveguide for receiving the source unmodulated optical beam from the laser source; and

a first optical mirror structure for receiving the source unmodulated optical beam from the first optical beam waveguide and deflecting the source unmodulated optical beam as a deflected source unmodulated optical beam toward the receiving die.

5. The apparatus of claim 4 , where the first optical mirror structure comprises an angled interface deflection surface that is offset by 45 degrees from the lateral plane of the first die for perpendicularly deflecting the source unmodulated optical beam.

6. The apparatus of claim 4 , where the one or more second optical beam routing structures on the receiving die comprise:

a second optical through silicon via structure for receiving the deflected source unmodulated optical beam from the first die;

a second optical mirror structure for deflecting the deflected source unmodulated optical beam from the second optical through silicon via structure as a second deflected source unmodulated optical beam toward a modulator on the receiving die; and

a second optical beam waveguide for transmitting the second deflected source unmodulated optical beam to the modulator on the receiving die.

7. The apparatus of claim 6 , where the one or more third optical beam routing structures on the receiving die comprise:

a third optical beam waveguide for receiving the modulated optical beam signal from the modulator on the receiving die; and

a third optical mirror structure for receiving the output modulated beam signal from the third optical beam waveguide and deflecting the output modulated optical beam signal toward the first die.

8. The apparatus of claim 1 , where the first die and at least one receiving die comprise a first die and a plurality of receiving die attached in a die stack.

9. The apparatus of claim 8 , further comprising a plurality of non-intersecting optical beam output routing structures for optically routing the output modulated optical beam signal from each receiving die to the first die.

10. The apparatus of claim 8 , where the die stack is at least partially encapsulated by a packaging structure formed with mold compound.

11. The apparatus of claim 10 , where the packaging structure is formed with a transparent mold compound.

12. The apparatus of claim 10 , where the packaging structure comprises a transparent layer formed in the mold compound to provide a transparent output optical signal path from the packaging structure for an output modulated optical beam signal generated by the receiving die.

13. A method, comprising:

generating an unmodulated laser source light beam at a first die in a die stack;

transmitting the unmodulated source light beam to a modulator located at a receiving die in the die stack using one or more optical routing structures formed in the die stack; and

generating an information-modulated optical signal from the unmodulated source light beam at one of the one or more modulators based on electrical signal information provided to said one of the one or more modulators.

14. The method of claim 13 , where generating the unmodulated source light beam signal comprises generating a source light beam of unmodulated monochromatic coherent light at a laser source formed in the first die.

15. The method of claim 13 , where transmitting the unmodulated source light beam comprises transmitting the unmodulated laser source light beam through one or more optical beam waveguides, optical through silicon via structures, and optical mirror structures formed in the die stack to route the unmodulated source light beam from the first die to the modulator located at the receiving die.

16. The method of claim 13 , where generating the information-modulated optical beam signal comprises generating the information-modulated optical beam signal based on electrical signal information produced by the receiving die in the die stack.

17. The method of claim 13 , further comprising transmitting one or more information-modulated optical beam signals from the modulator to the first die using one or more output optical routing structures formed in the die stack.

18. The method of claim 17 , where transmitting one or more information-modulated optical signals comprises transmitting one or more information-modulated optical beam signals through one or more output optical beam waveguides, output optical through silicon via structures, and output optical mirror structures formed in the die stack to route the one or more information-modulated optical signals to the first die.

19. The method of claim 13 , further comprising transmitting one or more information-modulated optical beam signals from the one or more modulators through a packaging structure formed to at least partially encapsulate the die stack.

20. A stacked die device, comprising:

an optical source die electrically connected to the conductor array and attached to the system board, comprising a laser source for generating an unmodulated source light beam and one or more optical routing structures for optically transmitting the unmodulated source light beam through the optical source die; and

a second die connected and attached to the optical source die in a die stack, the second die comprising:

a modulator for generating an information-modulated optical signal from the unmodulated source light beam based on electrical signal information provided to said modulator, and

one or more optical routing structures for optically receiving the unmodulated source light beam from the optical source die and transmitting the received unmodulated source light beam to the modulator; and

a packaging structure attached to the substrate board that at least partially encapsulates the optical source die and the second die formed in a die stack.

Assignments (29)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 28, 2025
From: NXP USA, INC.
To: ASCALE TECHNOLOGIES LLC
Reel/Frame 070026/0838 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040925 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Feb 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V. F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 052917/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040928 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Jan 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 052915/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 042985 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051029/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 039361 FRAME 0212. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051029/0387 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051030/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 042762 FRAME 0145. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051145/0184 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050745/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050744/0097 →
CORRECTIVE ASSIGNMENT TO CORRECT THE TO CORRECT THE APPLICATION NO. FROM 13,883,290 TO 13,833,290 PREVIOUSLY RECORDED ON REEL 041703 FRAME 0536. ASSIGNOR(S) HEREBY CONFIRMS THE THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS.. Recorded Feb 20, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: SHENZHEN XINGUODU TECHNOLOGY CO., LTD.
Reel/Frame 048734/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12681366 PREVIOUSLY RECORDED ON REEL 039361 FRAME 0212. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded May 9, 2017
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 042762/0145 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12681366 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded May 9, 2017
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 042985/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE PATENTS 8108266 AND 8062324 AND REPLACE THEM WITH 6108266 AND 8060324 PREVIOUSLY RECORDED ON REEL 037518 FRAME 0292. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Feb 1, 2017
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041703/0536 →
MERGER Recorded Jan 3, 2017
From: FREESCALE SEMICONDUCTOR, INC.
To: NXP USA, INC.
Reel/Frame 041144/0363 →
RELEASE OF SECURITY INTEREST Recorded Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12092129 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Jul 14, 2016
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039361/0212 →
SUPPLEMENT TO THE SECURITY AGREEMENT Recorded Jun 16, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039138/0001 →
SECURITY AGREEMENT SUPPLEMENT Recorded Mar 7, 2016
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 038017/0058 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 13, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037518/0292 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 6, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037445/0592 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0804 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0819 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0844 →
SECURITY AGREEMENT Recorded Nov 6, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 031591/0266 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Sep 20, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 031248/0510 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Sep 20, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 031248/0627 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Sep 20, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 031248/0698 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Sep 20, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 031248/0750 →