Method for manufacturing silicon-based electronics with disabling feature
View Patent ↗Silicon-based circuitry is dissolved or otherwise disabled in a controlled manner by reactive materials provided beneath the insulating layer on which the circuitry is formed. Heat and/or light induced acid generating materials are provided for corroding one or more circuitry components. Additionally and/or alternatively, gas-producing materials are deposited in compartments beneath the insulating layer. The gas-producing materials cause pressure to rise within the compartments, damaging the chip. Chemical reactions within the chip may be facilitated by heating elements and/or light generating elements embedded within the chip and actuated by triggering circuits.
1. A method comprising:
obtaining a structure including a semiconductor layer, an electrically insulating layer, and a substrate layer, the semiconductor layer comprising silicon and adjoining the insulating layer;
forming electronic circuitry including a plurality of electrical components on the semiconductor layer;
removing the substrate layer, thereby exposing a bottom surface of the insulating layer;
depositing a chemically reactive layer in adjoining relation to the bottom surface of the insulating layer, the chemically reactive layer being corrosive to at least one of the electrical components, capable of generating a material corrosive to at least one of the electrical components upon activation, or capable of generating gas upon activation,
forming an encapsulation layer over the chemically reactive layer; and wherein the method further including the steps of forming a triggering circuit on the semiconductor layer and at least one of a heating element and a light emitting element electrically connected to the triggering circuit for activating the chemically reactive layer.
2. The method of claim 1 , wherein the heating element electrically connected to the triggering circuit is formed, the heating element being comprised of reactive materials capable of causing an exothermic reaction that heats the chemically reactive layer.
3. The method of claim 1 , wherein the chemically reactive layer is comprised of acid generating material activated by heat and/or light and capable of producing one or more acids.
4. The method of claim 3 , further including the step of forming one or more plugs containing sacrificial material extending through the insulating layer, the one or more acids being more corrosive to the sacrificial material than to the insulating layer.
5. The method of claim 1 , further including the step of forming a plurality of compartments within the substrate layer and bounding the insulating layer, the chemically reactive layer being deposited within the compartments following removal of the substrate layer, the chemically reactive layer being comprised of gas generating material activated by heat and/or light.
6. The method of claim 5 , wherein the step of forming the plurality of compartments within the substrate layer includes forming a plurality of highly doped regions within the substrate layer beneath the insulating layer.
7. The method of claim 1 , wherein the electronic circuitry comprises CMOS circuitry.