Aluminum gallium nitride etch stop layer for gallium nitride based devices
View Patent ↗A semiconductor structure includes a III-nitride substrate with a first side and a second side opposing the first side. The III-nitride substrate is characterized by a first conductivity type and a first dopant concentration. The semiconductor structure also includes a III-nitride epitaxial layer of the first conductivity type coupled to the first surface of the III-nitride substrate, and a first metallic structure electrically coupled to the second surface of the III-nitride substrate. The semiconductor structure further includes an AlGaN epitaxial layer coupled to the III-nitride epitaxial layer of the first conductivity type, and a III-nitride epitaxial structure of a second conductivity type coupled to the AlGaN epitaxial layer. The III-nitride epitaxial structure comprises at least one edge termination structure.
1. A method of fabricating edge termination structures in gallium nitride (GaN) materials, the method comprising:
providing a n-type GaN substrate having a first surface and a second surface;
forming an n-type GaN epitaxial layer coupled to the first surface of the n-type GaN substrate;
forming a first metallic structure electrically coupled to the second surface of the n-type GaN substrate;
forming an AlGaN epitaxial layer coupled to the n-type GaN epitaxial layer, wherein the AlGaN epitaxial layer is characterized by an aluminum mole fraction ranging from about 0.01 to about 0.5;
forming a p-type GaN epitaxial layer coupled to the AlGaN epitaxial layer; and
removing at least a portion of the p-type GaN epitaxial layer using a photo-enhanced chemical etching process to:
form an exposed portion of the AlGaN epitaxial layer; and
form at least one edge termination structure.
2. The method of claim 1 wherein the n-type GaN substrate is characterized by a first n-type dopant concentration and the n-type GaN epitaxial layer is characterized by a second n-type dopant concentration less than the first n-type dopant concentration.
3. The method of claim 1 further comprising forming a second metallic structure electrically coupled to the exposed portion of the n-type GaN epitaxial layer to create a Schottky contact.
4. The method of claim 3 wherein the second metallic structure is further electrically coupled to the at least one edge termination structure.
5. The method of claim 1 wherein removing the at least a portion of the p-type GaN epitaxial layer includes forming a p-type device structure using a remaining portion of the p-type GaN epitaxial layer, the method further comprising forming a second metallic structure electrically coupled to the p-type device structure.
6. The method of claim 1 further comprising forming a metallic field plate coupled to the at least one edge termination structure.
7. The method of claim 1 wherein the at least one edge termination structure circumscribes a device structure.
8. A method of processing III-nitride materials, the method comprising:
providing a III-nitride epitaxial structure including:
a III-nitride substrate;
an AlGaN etch stop layer coupled to the III-nitride substrate and characterized by an aluminum mole fraction ranging from about 0.01 to about 0.5; and
a III-nitride epitaxial layer coupled to the AlGaN etch stop layer;
forming a masking layer on predetermined portions of the III-nitride epitaxial structure to form exposed regions;
exposing the exposed regions of the III-nitride epitaxial structure to an etchant;
exposing the III-nitride epitaxial structure to electromagnetic radiation;
absorbing a portion of the electromagnetic radiation in the III-nitride epitaxial layer;
etching at least a portion of the III-nitride epitaxial layer; and
terminating the etching in the AlGaN etch stop layer.
9. The method of claim 8 wherein the III-nitride substrate comprises an n-type GaN substrate.
10. The method of claim 8 wherein the III-nitride epitaxial layer comprises a p-type GaN layer.
11. The method of claim 8 wherein the etchant comprises KOH.
12. The method of claim 8 wherein the electromagnetic radiation is characterized by a wavelength less than 365 nm.
13. The method of claim 8 wherein an absorption coefficient of the AlGaN etch stop layer at wavelengths associated with the electromagnetic radiation is less than 1,000 cm −1 .
14. A method of fabricating edge termination structures in gallium nitride (GaN) materials, the method comprising:
providing a n-type GaN substrate having a first surface and a second surface;
forming an n-type GaN epitaxial layer coupled to the first surface of the n-type GaN substrate;
forming a first metallic structure electrically coupled to the second surface of the n-type GaN substrate;
forming an AlGaN epitaxial layer coupled to the n-type GaN epitaxial layer;
forming a p-type GaN epitaxial layer coupled to the AlGaN epitaxial layer; and
removing at least a portion of the p-type GaN epitaxial layer using a photo-enhanced chemical etching process with electromagnetic radiation characterized by a wavelength less than 365 nm to:
form an exposed portion of the AlGaN epitaxial layer; and
form at least one edge termination structure.
15. The method of claim 14 wherein the n-type GaN substrate is characterized by a first n-type dopant concentration and the n-type GaN epitaxial layer is characterized by a second n-type dopant concentration less than the first n-type dopant concentration.
16. The method of claim 14 further comprising forming a second metallic structure electrically coupled to the exposed portion of the n-type GaN epitaxial layer to create a Schottky contact.
17. The method of claim 16 wherein the second metallic structure is further electrically coupled to the at least one edge termination structure.
18. The method of claim 14 wherein removing the at least a portion of the p-type GaN epitaxial layer includes forming a p-type device structure using a remaining portion of the p-type GaN epitaxial layer, the method further comprising forming a second metallic structure electrically coupled to the p-type device structure.
19. The method of claim 14 further comprising forming a metallic field plate coupled to the at least one edge termination structure.
20. The method of claim 14 wherein the at least one edge termination structure circumscribes a device structure.
21. A method of processing III-nitride materials, the method comprising:
providing a III-nitride epitaxial structure including:
a III-nitride substrate;
an AlGaN etch stop layer coupled to the III-nitride substrate; and
a III-nitride epitaxial layer coupled to the AlGaN etch stop layer;
forming a masking layer on predetermined portions of the III-nitride epitaxial structure to form exposed regions;
exposing the exposed regions of the III-nitride epitaxial structure to an etchant;
exposing the III-nitride epitaxial structure to electromagnetic radiation characterized by a wavelength less than 365 nm;
absorbing a portion of the electromagnetic radiation in the III-nitride epitaxial layer;
etching at least a portion of the III-nitride epitaxial layer; and
terminating the etching in the AlGaN etch stop layer.
22. The method of claim 21 wherein the III-nitride substrate comprises an n-type GaN substrate.
23. The method of claim 21 wherein the III-nitride epitaxial layer comprises a p-type GaN layer.
24. The method of claim 21 wherein the etchant comprises KOH.
25. The method of claim 21 wherein an absorption coefficient of the AlGaN etch stop layer at wavelengths associated with the electromagnetic radiation is less than 1,000 cm −1 .