FinFET structures having silicon germanium and silicon channels
Silicon and silicon germanium fins are formed on a semiconductor wafer or other substrate in a manner that facilitates production of closely spaced nFET and pFET devices. A patterned mandrel layer is employed for forming one or more recesses in the wafer prior to the epitaxial growth of a silicon germanium layer that fills the recess. Spacers are formed on the side walls of the patterned mandrel layer followed by removal of the mandrel layer. The exposed areas of the wafer and silicon germanium layer between the spacers are etched to form fins usable for nFET devices from the wafer and fins usable for pFET devices from the silicon germanium layer.
1. A structure comprising:
a substrate comprised of crystalline silicon, the substrate including a body portion and a plurality of first fins comprised of crystalline silicon extending from and integral with the body portion;
a plurality of second fins, each of the second fins including a crystalline silicon base integral with the body portion of the substrate and a silicon germanium portion adjoining the silicon base, the plurality of second fins being parallel to the plurality of first fins, one or more of the first and second fins being within less than 30 nm of at least one or more of another one or more of the first and second fins;
a plurality of dielectric caps, each dielectric cap adjoining a top surface of each of the first and second fins;
an intermediate region including a silicon portion integral with the body portion of the substrate and a silicon germanium portion adjoining the silicon portion, the intermediate region and the first and second fins being substantially equal in height, and
a mask adjoining a top surface of the intermediate region.
2. A structure comprising:
a crystalline silicon substrate, the substrate including a body portion and a top surface;
one or more trenches within the crystalline silicon substrate;
one or more silicon germanium regions within the one or more trenches, the silicon germanium regions having one or more top surfaces coplanar with the top surface of the crystalline silicon substrate;
a plurality of mandrel portions on the top surface of the crystalline silicon substrate, each of the mandrel portions including sidewalls, and
spacers positioned on the sidewalls of the mandrel portions, some of the spacers adjoining the crystalline silicon substrate and others of the spacers adjoining the top surfaces of the silicon germanium regions.
3. The structure of claim 2 , wherein each of the mandrel portions has a width of thirty nanometers or less.