Dielectric filler fins for planar topography in gate level
View Patent ↗An array of stacks containing a semiconductor fins and an oxygen-impermeable cap is formed on a semiconductor substrate with a substantially uniform areal density. Oxygen-impermeable spacers are formed around each stack, and the semiconductor substrate is etched to vertically extend trenches. Semiconductor sidewalls are physically exposed from underneath the oxygen-impermeable spacers. The oxygen-impermeable spacers are removed in regions in which semiconductor fins are not needed. A dielectric oxide material is deposited to fill the trenches. Oxidation is performed to convert a top portion of the semiconductor substrate and semiconductor fins not protected by oxygen-impermeable spacers into dielectric material portions. Upon removal of the oxygen-impermeable caps and remaining oxygen-impermeable spacers, an array including semiconductor fins and dielectric fins is provided. The dielectric fins alleviate variations in the local density of protruding structures, thereby reducing topographical variations in the height of gate level structures to be subsequently formed.
1. A semiconductor structure comprising:
a semiconductor oxide layer located on a semiconductor material layer;
a semiconductor oxide fin that protrudes above a planar surface of said semiconductor oxide layer;
a semiconductor oxide pedestal that protrudes above said planar surface of said semiconductor oxide layer and laterally spaced from said semiconductor oxide fin; and
a semiconductor fin contacting, and located above, said semiconductor oxide pedestal, wherein a topmost surface of said semiconductor oxide fin is located above a topmost portion of said semiconductor oxide pedestal, and sidewalls of said semiconductor oxide fin are vertically coincident with sidewalls of said semiconductor oxide pedestal.
2. The semiconductor structure of claim 1 , further comprising a gate dielectric layer contacting said planar top surface of said semiconductor oxide layer, surfaces of said semiconductor oxide fin, surfaces of said semiconductor oxide pedestal, and surfaces of said semiconductor fin.
3. The semiconductor structure of claim 2 , further comprising a gate conductor layer contacting surfaces of said gate dielectric layer.
4. The semiconductor structure of claim 1 , wherein said semiconductor fin comprises a pair of convex surfaces that contact surfaces of said semiconductor oxide pedestal.
5. The semiconductor structure of claim 4 , wherein said pair of convex surfaces is adjoined at an edge that is parallel to a pair of vertical sidewalls of said semiconductor fin.
6. The semiconductor structure of claim 1 , wherein said topmost surface of said semiconductor oxide fin is coplanar with a topmost surface of said semiconductor fin.
7. The semiconductor structure of claim 1 , wherein said topmost surface of said semiconductor oxide fin is located below a horizontal plane including a topmost surface of said semiconductor fin.
8. A semiconductor structure comprising:
a semiconductor oxide layer located on a semiconductor material layer;
a semiconductor oxide fin that protrudes above a planar surface of said semiconductor oxide layer;
a semiconductor oxide pedestal that protrudes above said planar surface of said semiconductor oxide layer and laterally spaced from said semiconductor oxide fin; and
a semiconductor fin contacting, and located above, said semiconductor oxide pedestal, wherein a topmost surface of said semiconductor oxide fin is located above a topmost portion of said semiconductor oxide pedestal, wherein sidewalls of said semiconductor oxide fin are laterally recessed inward with respect to sidewalls of said semiconductor fin.
9. The semiconductor structure of claim 8 , further comprising a gate dielectric layer contacting said planar top surface of said semiconductor oxide layer, surfaces of said semiconductor oxide fin, surfaces of said semiconductor oxide pedestal, and surfaces of said semiconductor fin.
10. The semiconductor structure of claim 9 , wherein said semiconductor fin comprises a pair of convex surfaces that contact surfaces of said semiconductor oxide pedestal.
11. The semiconductor structure of claim 10 , wherein said pair of convex surfaces is adjoined at an edge that is parallel to a pair of vertical sidewalls of said semiconductor fin.
12. The semiconductor structure of claim 8 , wherein said topmost surface of said semiconductor oxide fin is coplanar with a topmost surface of said semiconductor fin.
13. The semiconductor structure of claim 8 , wherein said topmost surface of said semiconductor oxide fin is located below a horizontal plane including a topmost surface of said semiconductor fin.
14. A semiconductor structure comprising:
a semiconductor oxide layer located on a semiconductor material layer;
a semiconductor oxide fin that protrudes above a planar surface of said semiconductor oxide layer;
a semiconductor oxide pedestal that protrudes above said planar surface of said semiconductor oxide layer and laterally spaced from said semiconductor oxide fin; and
a semiconductor fin contacting, and located above, said semiconductor oxide pedestal, wherein a topmost surface of said semiconductor oxide fin is located above a topmost portion of said semiconductor oxide pedestal, wherein a portion of an interface between said semiconductor oxide layer and said semiconductor material layer protrudes downward in regions that do not underlie said semiconductor fin or said semiconductor oxide fin with respect to another portion of said interface in regions that underlie said semiconductor fin or said semiconductor oxide fin.
15. The semiconductor structure of claim 14 , further comprising a gate dielectric layer contacting said planar top surface of said semiconductor oxide layer, surfaces of said semiconductor oxide fin, surfaces of said semiconductor oxide pedestal, and surfaces of said semiconductor fin.
16. The semiconductor structure of claim 14 , wherein said semiconductor fin comprises a pair of convex surfaces that contact surfaces of said semiconductor oxide pedestal.
17. The semiconductor structure of claim 16 , wherein said pair of convex surfaces is adjoined at an edge that is parallel to a pair of vertical sidewalls of said semiconductor fin.
18. The semiconductor structure of claim 14 , wherein sidewalls of said semiconductor oxide fin are vertically coincident with sidewalls of said semiconductor oxide pedestal.
19. The semiconductor structure of claim 14 , wherein said topmost surface of said semiconductor oxide fin is located below a horizontal plane including a topmost surface of said semiconductor fin.
20. The semiconductor structure of claim 14 , wherein sidewalls of said semiconductor oxide fin are laterally recessed inward with respect to sidewalls of said semiconductor fin.