FinFET with merge-free fins
A semiconductor device comprises an insulation layer, an active semiconductor layer formed on an upper surface of the insulation layer, and a plurality of fins formed on the insulation layer. The fins are formed in the gate and spacer regions between a first source/drain region and second source/drain region, without extending into the first and second source/drain regions.
1. A method of fabricating a semiconductor device, comprising:
forming a semiconductor substrate including a plurality of layers and a gate region located between first and second non-gate regions that are different from the gate region, the first and second non-gate regions formed atop an insulation layer and having a non-etched upper surface extending along a length of the insulation layer to define a non-gate insulation length;
forming a gate pocket at the gate region, the gate pocket extending through the plurality of layers; and
forming a plurality of fins in the gate pocket to define a fin length that extends perpendicular to a width of the insulation layer and parallel to the non-gate insulation length such that each fin among the plurality of fins is isolated from the first and second non-gate regions;
forming a first spacer which covers the plurality of fins in the gate pocket;
etching a portion of the first spacer which covers the plurality of fins in the gate pocket;
forming a dummy gate in the gate pocket after etching the portion of the first spacer;
forming a second spacer on a side of the first spacer adjacent to the non-gate region;
removing the dummy gate in the gate pocket before a gate stack is formed;
forming the gate stack in the gate pocket on the first spacer on a side opposing the second spacer; and
forming a metal electrode within the gate stack on the side opposing the second spacer,
wherein the fin length of each fin formed in the gate pocket does not extend beyond the first spacer,
the forming the first spacer within the gate pocket further comprises depositing a spacer layer of the first spacer which covers the plurality of fins within the gate pocket, and
the metal electrode covers sidewalls and a top surface of the plurality of fins within the gate pocket.
2. The method of claim 1 , forming the first spacer further comprises etching the spacer layer to form the first spacer against walls of the gate pocket.
3. The method of claim 2 , forming the gate stack further comprises depositing a gate material in the gate pocket to cover the plurality of fins.
4. The method of claim 3 , further comprising doping the first and second non-gate regions after the forming a plurality of fins is performed.
5. The method of claim 1 , wherein the second spacer is formed on exposed sides of the first spacer.
6. The method of claim 1 , further comprising forming a dummy gate in the gate pocket prior to forming the second spacer.
7. The method of claim 6 , further comprising extending the first spacer by ion implantation.
8. The method of claim 6 , wherein the second spacer is formed on the first spacer at a location higher than a height of the plurality of fins.
9. The method of claim 6 , wherein the first spacer is formed on a wall of the gate pocket and the first spacer contacting the gate region and the first and second non-gate regions to isolate each fin among the plurality of fins from the first and second non-gate regions; and the second spacer is formed on exposed sides of the first spacer, the exposed sides of the first spacer being opposite the gate pocket.
10. The method of claim 1 , further comprising forming a gate insulator layer between the metal electrode and the first spacer.
11. The method of claim 10 , wherein the gate insulation layer comprises a high dielectric constant which includes hafnium silicon oxynitride, and the metal electrode comprises tantalum carbide.
12. The method of claim 10 , wherein the gate insulator layer covers the sidewalls and the top surface of the plurality of fins within the gate pocket.
13. The method of claim 12 , wherein the metal electrode covering the sidewalls and the top surface of the plurality of fins within the gate pocket is directly over the gate insulator layer covering the sidewalls of the top surface of the plurality of fins within the gate pocket.
14. The method of claim 13 , wherein the second spacer is between the first spacer and a flowable oxide layer.
15. The method of claim 1 , wherein the first and second non-gate regions comprise a masking layer including silicon dioxide which is directly over a top surface of an active silicon-on-insulator (SOI) layer.
16. The method of claim 1 further comprising:
forming an active silicon-on-insulator (SOI) layer on the insulation layer in the first and second non-gate regions;
ion implanting to form source and drain regions in the first and second non-gate regions; and
forming a masking layer on the SOI layer after the ion implanting to form source and drain regions in the first and second non-gate regions.
17. The method of claim 16 , further comprising:
implanting another plurality of ions to extend the first spacer; and
forming a gate insulator layer between the metal electrode and the first spacer, the gate insulator layer comprising zirconium dioxide.
18. The method of claim 17 , wherein the gate pocket is formed by a sidewall image transfer (SIT) process to extend through the masking layer and the SOI layer, and the fins comprise a single crystal semiconductor material and are formed by a sidewall image transfer (SIT) process with a fin pitch from about 8 nm to about 50 nm.