Coaxial transmission line microstructure with a portion of increased transverse dimension and method of formation thereof
View Patent ↗Provided are coaxial transmission line microstructures formed by a sequential build process, and methods of forming such microstructures. The microstructures include a transition structure for transitioning between the coaxial transmission line and an electrical connector. The microstructures have particular applicability to devices for transmitting electromagnetic energy and other electronic signals.
1. A transmission line micro structure, comprising:
a transmission line, including:
at least one center conductor, at least a portion of the at least one center conductor extending along a longitudinal axis; and
at least one outer conductor disposed around the at least one center conductor, the at least one outer conductor including:
first and second ends and a shortened wall portion disposed at the second end, the shortened wall portion extending parallel to the longitudinal axis a lesser extent than that of the at least one center conductor to provide an opening in the at least one outer conductor wall at a location around a selected portion of the at least one center conductor thereby exposing a longitudinal portion of the at least one center conductor;
wherein the at least one outer conductor comprises an increased transverse dimension at the second end relative to the first end, the transverse dimension taken along a direction normal to the longitudinal axis.
2. The transmission line micro structure according to claim 1 , comprising a connector attached to the transmission line micro structure proximate the shortened wall portion, the connector in electrical communication with the at least one center conductor.
3. The transmission line micro structure according to claim 1 , wherein the increased transverse dimension of the outer conductor includes a circular shape in a plane containing the longitudinal axis.
4. The transmission line micro structure according to claim 1 , wherein the at least one center conductor comprises, at the second end, a step change in height normal to the longitudinal axis.
5. The transmission line micro structure according to claim 1 , wherein the at least one center conductor comprises a plurality of center conductors.
6. The transmission line micro structure according to claim 5 , wherein the at least one outer conductor comprises a plurality of outer conductors.
7. A method of forming a transmission line microstructure, comprising:
disposing a plurality of layers over a substrate, wherein the plurality of layers comprise one or more of dielectric, conductive, and sacrificial materials; and
forming from the plurality of layers:
at least one center conductor, at least a portion of the at least one center conductor extending along a longitudinal axis; and
at least one outer conductor disposed around the at least one center conductor, the outer conductor including:
first and second ends and a shortened wall portion disposed at the second end, the shortened wall portion extending parallel to the longitudinal axis a lesser extent than that of the at least one center conductor to provide an opening in the at least one outer conductor wall at a location around a selected portion of the at least one center conductor thereby exposing a longitudinal portion of the at least one center conductor;
wherein the at least one outer conductor comprises an increased transverse dimension at the second end relative to the first end, the transverse dimension taken along a direction normal to the longitudinal axis.
8. The method according to claim 7 , wherein the at least one center conductor comprises a plurality of center conductors.
9. The method according to claim 8 , wherein the at least one outer conductor comprises a plurality of outer conductors.
10. The method according to claim 7 , wherein the at least one center conductor comprises, at the second end, a step change in height normal to the longitudinal axis.
11. The method according to claim 7 , wherein the increased transverse dimension of the outer conductor includes a circular shape in a plane containing the longitudinal axis.