IP Library Granted Patent US 9,086,551
Granted Patent B2
US 9,086,551 · App. 14/067,535 · Granted Jul 21, 2015

Double mirror structure for wavelength division multiplexing with polymer waveguides

Inventor: Jean Benoit Héroux (Tokyo, JP)
Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
G02B6/4215G02B6/4214
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Quick Facts
Patent No.
US 9,086,551
App. No.
14/067,535
Granted
Jul 21, 2015
Kind
B2
Abstract

Methods for wavelength filtering and structures for accomplishing the same. Wavelength filtering includes forming grooves in a waveguide to define angled surfaces in a path of the waveguide; forming a reflective layer on the angled surfaces; depositing cladding material on top of the waveguide and on the angled surfaces; forming a filter layer on an active region of an opto-electronic device, which transmits a single wavelength and reflects other wavelengths used; depositing the opto-electrical device on the cladding layer such that the filter layer is aligned with a point of incidence of a light beam reflected from the reflective layer; and electrically bonding the opto-electronic device to vias in the waveguide structure.

Claims (28)

1. A wavelength filtering structure, comprising:

a first reflective surface having a curve along a single axis to compensate for beam divergence in a single dimension, positioned at an end of a first waveguide section that is tapered relative to a carrying width of the first waveguide section, that reflects a beam comprising a plurality of wavelengths;

a filter in the path of the reflected beam that allows a selected wavelength from the reflected beam to pass and that reflects all other wavelengths in a selected beam; and

a second reflective surface, positioned adjacent to the first reflective surface and at an end of a second waveguide section that is widened relative to a carrying width of the second waveguide section, that reflects the selected beam into a core of the second waveguide section.

2. The wavelength filtering structure of claim 1 , wherein the first and second reflective surfaces are formed at an angle relative to the beam path.

3. The wavelength filtering structure of claim 2 , wherein the first and second reflective surfaces are formed at an angle less than 45 degrees relative to the beam path.

4. The wavelength filtering structure of claim 1 , further comprising a photodetector configured to receive the selected wavelength that passes through the filter.

5. The wavelength filtering structure of claim 1 , further comprising an emitter configured to emit the selected wavelength through the filter.

6. The wavelength filtering structure of claim 5 , wherein the emitter comprises a lens configured to orient the emitted light in a direction parallel to the existing beam.

7. The wavelength filtering structure of claim 5 , wherein the emitter is set at a non-zero lateral distance from a point of incidence on the filter where the reflected beam hits.

8. The wavelength filtering structure of claim 7 , wherein the emitted wavelength reflects from the second mirror to enter the second waveguide section.

9. The wavelength filtering structure of claim 1 , further comprising a focusing element at an end of the first waveguide section configured to compensate for beam divergence.

10. A wavelength division multiplexer/demultiplexer, comprising:

a plurality of filtering structures formed next to each other on a board, each transmitting a different wavelength from a beam comprising a plurality of wavelengths, each filtering structure comprising:

a first reflective surface, positioned at an end of a first waveguide section that is tapered relative to a carrying width of the first waveguide section, that reflects the beam comprising a plurality of wavelengths, formed at an angle less than 45 degrees relative to a beam path and having a curve along a single axis to compensate for beam divergence;

a filter in the path of the reflected beam that allows the selected wavelength from the reflected beam to be transmitted and that reflects all other wavelengths in a selected beam; and

a second reflective surface, positioned adjacent to the first reflective surface and at an end of a second waveguide section that is widened relative to a carrying width of the second waveguide section, that reflects the selected beam to the end of the second waveguide section, formed at an angle less than 45 degrees relative to the beam path.

11. A method for forming a wavelength filtering structure, comprising:

forming a waveguide having a first section that tapers in a first dimension and a second section that is widened in the first dimension relative to a carrying width of the respective waveguide sections;

forming grooves in the waveguide to define angled surfaces in a path of the waveguide, wherein one of said grooves is formed with a curve along a single axis of one of the angled surfaces to compensate for beam divergence in a second dimension;

forming a reflective layer on the angled surfaces;

depositing cladding material on top of the waveguide and on the angled surfaces;

forming a filter layer on an active region of an opto-electronic device, which transmits a single wavelength and reflects other wavelengths used;

depositing the opto-electrical device on the cladding layer such that the filter layer is aligned with a point of incidence of a light beam reflected from the reflective layer; and

electrically bonding the opto-electronic device to vias in the waveguide structure.

12. The method of claim 11 , wherein forming grooves comprises forming the angled surfaces at an angle less than 45 degrees relative to a waveguide axis.

13. The method of claim 11 , wherein the opto-electronic device comprises a photodetector configured to receive the selected wavelength that passes through the filter and wherein said step of bonding comprises bonding a surface of the electrical device having said photodetector to the cladding layer such that the photodetector is aligned with a point of incidence of a beam.

14. The method of claim 11 , wherein the opto-electronic device comprises an emitter configured to emit the selected wavelength through the filter and wherein said step of bonding comprises bonding a surface of the electrical device having said emitter to the cladding layer such that the emitter is set to a non-zero lateral distance from a point of incidence of a beam.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2015
From: GLOBALFOUNDRIES U.S. 2 LLC; GLOBALFOUNDRIES U.S. INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 036779/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2015
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 036550/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 30, 2013
From: HÉROUX, JEAN BENOIT
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 031512/0861 →
Continuity (1)
Related Publication 20150117811A1 · Apr 30, 2015