IP Library › Granted Patent US 9,379,078
Granted Patent B2
US 9,379,078 · App. 14/074,186 · Granted Jun 28, 2016

3D die stacking structure with fine pitches

Inventors: Chen-Hua Yu (Hsinchu, TW); Chen-Shien Chen (Zhubei, TW); Yen-Chang Hu (Tai-Chung, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H01L24/17H01L21/563H01L24/13H01L24/14H01L24/81H01L25/0657H01L24/11H01L24/16H01L2224/1134H01L2224/1147H01L2224/11462H01L2224/131H01L2224/13017H01L2224/13023H01L2224/13124H01L2224/13144H01L2224/13147H01L2224/13155H01L2224/13164H01L2224/1403H01L2224/14051H01L2224/16148H01L2224/16238H01L2224/1703H01L2224/17051H01L2224/73204H01L2224/81815H01L2224/831H01L2924/15311H01L2924/181
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Quick Facts
Patent No.
US 9,379,078
App. No.
14/074,186
Granted
Jun 28, 2016
Kind
B2
Abstract

A package includes package includes a first package component including a first plurality of electrical connectors at a top surface of the first package component, and a second plurality of electrical connectors longer than the first plurality of electrical connectors at the top surface of the first package component. A first device die is over the first package component and bonded to the first plurality of electrical connectors. A second package component is overlying the first package component and the first device die. The second package component includes a third plurality of electrical connectors at a bottom surface of the second package component. The third plurality of electrical connectors is bonded to the second plurality of electrical connectors. A fourth plurality of electrical connectors is at a bottom surface of the second package. The second and the fourth plurality of electrical connectors comprise non-solder metallic materials.

Claims (45)

1. A package comprising:

a first package component comprising:

a first plurality of electrical connectors at a top surface of the first package component; and

a second plurality of electrical connectors longer than the first plurality of electrical connectors at the top surface of the first package component;

a first device die over the first package component and bonded to the first plurality of electrical connectors, wherein the second plurality of electrical connectors has a length greater than a thickness of the first device die;

a second package component over the first package component and the first device die, wherein the second package component comprises:

a third plurality of electrical connectors at a bottom surface of the second package component, wherein the third plurality of electrical connectors is bonded to the second plurality of electrical connectors; and

a fourth plurality of electrical connectors at a bottom surface of the second package component, wherein the fourth plurality of electrical connectors comprises a second non-solder metallic material; and

a third package component under the first package component, wherein the third package component is bonded to the fourth plurality of electrical connectors, and wherein the fourth plurality of electrical connectors has a length greater than a sum of the thickness of the first device die and a thickness of the first package component.

2. The package of claim 1 , wherein the first plurality of electrical connectors has a first pitch, and the second plurality of electrical connectors has a second pitch equal to or smaller than the first pitch.

3. The package of claim 1 , wherein the second plurality of electrical connectors has a third pitch, and the fourth plurality of electrical connectors has a fourth pitch equal to or smaller than the third pitch.

4. The package of claim 1 , and wherein the fourth plurality of electrical connectors has a length-to-width ratio greater than about 4.

5. The package of claim 1 , wherein the first package component comprises a second device die.

6. The package of claim 1 , wherein the second package component comprises a third device die.

7. The package of claim 1 , wherein the third package component comprises a package substrate.

8. A package comprising:

a first package component comprising:

a first plurality of electrical connectors at a top surface of the first package component; and

a second plurality of electrical connectors longer than the first plurality of electrical connectors at the top surface of the first package component;

a first device die over the first package component and bonded to the first plurality of electrical connectors, wherein the second plurality of electrical connectors has a length greater than a thickness of the first device die;

a second package component over the first package component and the first device die, wherein the second package component comprises:

a third plurality of electrical connectors at a bottom surface of the second package component, wherein the third plurality of electrical connectors is bonded to the second plurality of electrical connectors; and

a fourth plurality of electrical connectors at a bottom surface of the second package component, wherein the fourth plurality of electrical connectors comprises a second non-solder metallic material;

a third package component under the first package component, wherein the third package component is bonded to the fourth plurality of electrical connectors, and wherein the fourth plurality of electrical connectors has a length greater than a sum of the thickness of the first device die and a thickness of the first package component; and

a first encapsulating material encircling each of the fourth plurality of electrical connectors, wherein the first encapsulating material further extends into a gap between the first package component and the third package component.

9. The package of claim 8 , wherein the first plurality of electrical connectors has a first pitch, and the second plurality of electrical connectors has a second pitch equal to or smaller than the first pitch.

10. The package of claim 8 , wherein the second plurality of electrical connectors has a third pitch, and the fourth plurality of electrical connectors has a fourth pitch equal to or smaller than the third pitch.

11. The package of claim 8 , and wherein the fourth plurality of electrical connectors has a length-to-width ratio greater than about 4.

12. The package of claim 8 , wherein the first package component comprises a second device die.

13. The package of claim 8 , wherein the second package component comprises a third device die.

14. The package of claim 8 , wherein the third package component comprises a package substrate.

15. The package of claim 8 further comprising a second encapsulating material encircling each of the second plurality of electrical connectors, wherein the first encapsulating material and the second encapsulating material are different from each other.

16. A package comprising:

a first package component comprising:

a first plurality of electrical connectors at a top surface of the first package component; and

a second plurality of electrical connectors longer than the first plurality of electrical connectors at the top surface of the first package component;

a first device die over the first package component and bonded to the first plurality of electrical connectors, wherein the second plurality of electrical connectors has a length greater than a thickness of the first device die;

a second package component over the first package component and the first device die, wherein the second package component comprises:

a third plurality of electrical connectors at a bottom surface of the second package component, wherein the third plurality of electrical connectors is bonded to the second plurality of electrical connectors; and

a fourth plurality of electrical connectors at a bottom surface of the second package component, wherein the fourth plurality of electrical connectors comprises a second non-solder metallic material, and wherein the second plurality of electrical connectors comprises first stud bumps, and the fourth plurality of electrical connectors comprises second stud bumps; and

a third package component under the first package component, wherein the third package component is bonded to the fourth plurality of electrical connectors, and wherein the fourth plurality of electrical connectors has a length greater than a sum of the thickness of the first device die and a thickness of the first package component.

17. The package of claim 16 , wherein the second plurality of electrical connectors comprises first bond balls and first bond wires overlying and connected to respective ones of the first bond balls.

18. The package of claim 17 , wherein the fourth plurality of electrical connectors comprises second bond balls and second bond wires underlying and connected to respective ones of the second bond balls.

19. The package of claim 16 , wherein the first package component comprises a second device die, and the second package component comprises a third device die.

20. The package of claim 16 , wherein the third package component comprises a package substrate.

Assignments (2)
CORRECTIVE ASSIGNMENT TO CORRECT THE THIRD ASSIGNOR'S NAME PREVIOUSLY RECORDED AT REEL: 031562 FRAME: 0373. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jun 5, 2019
From: YU, CHEN-HUA; CHEN, CHEN-SHIEN; HU, SHOU-CHENG
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 049375/0029 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 7, 2013
From: YU, CHEN-HUA; CHEN, CHEN-SHIEN; HU, YEN-CHANG
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 031562/0373 →
Continuity (1)
Related Publication 20150123268A1 · May 7, 2015