Semiconductor device package formed in a chip-on-wafer last process using thin film adhesives
View Patent ↗Methods for a semiconductor device package formed in a chip-on-wafer last process using thin film adhesives are disclosed and may include bonding a first carrier to a first surface of an interposer in wafer form, forming conductive bumps on a second surface of the interposer, bonding a second carrier to the conductive bumps utilizing a film adhesive, removing the first carrier from the interposer, bonding a semiconductor die to the first surface of the interposer, and encapsulating the die and the first surface of the interposer in an encapsulant material. The second carrier and the film adhesive may be removed from the conductive bumps utilizing a slide-off process. The interposer and encapsulant may be diced into a plurality of interposer and die structures. One of the die and interposer structures may be bonded to a substrate. The die may be bonded to the interposer utilizing a mass reflow process.
1. A method for semiconductor packaging, the method comprising:
forming front-side pads on a first surface of an interposer in wafer form;
bonding a first carrier directly to the first surface of the interposer;
exposing through-silicon vias (TSVs) in a second surface of the interposer;
forming conductive bumps on the exposed TSVs;
bonding a second carrier to the conductive bumps utilizing a film adhesive;
removing the first carrier from the interposer;
bonding one or more semiconductor die to the front-side pads on the first surface of the interposer;
removing the second carrier and the film adhesive from the conductive bumps;
dicing the interposer into a plurality of interposer and die structures; and
bonding one of the plurality of die and interposer structures to a substrate.
2. The method according to claim 1 , comprising bonding the one or more semiconductor die to the interposer utilizing a mass reflow process.
3. The method according to claim 2 , comprising utilizing a capillary underfill material after bonding the one or more semiconductor die to the interposer.
4. The method according to claim 1 , comprising bonding the one of the plurality of interposer and die structures to the substrate utilizing the conductive bumps formed on the exposed TSVs.
5. The method according to claim 4 , comprising bonding the one of the plurality of interposer and die structures to the substrate utilizing a mass reflow process on the conductive bumps formed on the exposed TSVs.
6. The method according to claim 1 , comprising encapsulating the one or more semiconductor die and at least a portion of the first surface of the interposer utilizing an encapsulant.
7. The method according to claim 6 , comprising grinding the encapsulant to expose a surface of the one or more semiconductor die.
8. The method according to claim 1 , comprising removing the second carrier and the film adhesive from the conductive bumps utilizing a slide-off process.
9. The method according to claim 1 , wherein an under bump metal is on the second surface of the interposer.
10. The method according to claim 9 , wherein conductive bumps are on the under bump metal on the second surface of the interposer.
11. The method according to claim 10 , comprising bonding the one of the plurality of interposer and die structures to the substrate utilizing the conductive bumps on the under bump metal on the second surface of the interposer.
12. The method according to claim 11 , comprising bonding the one of the plurality of interposer and die structures to the substrate utilizing a mass reflow process on the conductive bumps on the under bump metal on the second surface of the interposer.
13. The method according to claim 1 , comprising bonding the one of the plurality of interposer and die structures to the substrate utilizing conductive bumps on the substrate.
14. The method according to claim 1 , wherein the conductive bumps on the exposed TSVs comprise copper.
15. A method for semiconductor packaging, the method comprising:
providing an interposer in wafer form with front-side pads on a first surface of the interposer;
bonding a first carrier directly to the first surface of the interposer;
exposing vias in a second surface of the interposer;
forming contacts on the exposed vias;
bonding a second carrier to the contacts utilizing an adhesive;
removing the first carrier from the interposer;
bonding one or more semiconductor die to the front-side pads on the first surface of the interposer;
removing the second carrier and the adhesive from the contacts;
dicing the interposer into a plurality of interposer and die structures; and
bonding one of the plurality of die and interposer structures to a substrate.
16. The method according to claim 15 , comprising bonding one of the plurality of interposer and die structures to a substrate utilizing the conductive bumps formed on the exposed vias.
17. The method according to claim 15 , wherein the contacts on the exposed vias comprise conductive bumps.
18. The method according to claim 15 , comprising encapsulating the one or more semiconductor die and at least a portion of the first surface of the interposer utilizing an encapsulant.
19. The method according to claim 18 , comprising grinding the encapsulant to expose a surface of the one or more semiconductor die.