Method and apparatus for plasma dicing a semi-conductor wafer
View Patent ↗The present invention provides a method for plasma processing a substrate. The method comprising providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; loading a work piece onto the work piece support, the work piece having a support film, a frame and the substrate; providing a cover ring above the work piece, the cover ring having at least one perforated region, and at least one non-perforated region; generating a plasma using the plasma source; and processing the work piece using the generated plasma.
1. A method for plasma processing a substrate, the method comprising:
providing a process chamber having a wall;
providing a plasma source adjacent to the wall of the process chamber;
providing a work piece support within the process chamber;
loading a work piece onto said work piece support, said work piece having a support film, a frame and the substrate;
providing a cover ring above said work piece, said cover ring having at least one through hole that does not overlap the substrate, said through hole overlapping the work piece;
generating a plasma using the plasma source; and
processing said work piece using the generated plasma.
2. The method according to claim 1 wherein said through hole of said cover ring allowing plasma to contact the work piece.
3. The method according to claim 1 wherein said through hole of said cover ring overlapping the film.
4. The method according to claim 1 wherein said through hole of said cover ring covering at least a portion of the work piece where the work piece is in thermal contact with said work piece support.
5. The method according to claim 4 wherein said through hole of said cover ring not covering any portion of the work piece that is not in thermal contact with the work piece support.
6. The method according to claim 1 wherein said through hole of said cover ring overlapping the frame and overlapping the film.
7. A method for plasma processing a substrate, the method comprising:
providing process chamber having a wall;
providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; loading a work piece onto said work piece support, said work piece having a support film, a frame and the substrate;
providing a cover ring above said work piece, said cover ring having at least one perforated region, and at least one non-perforated region, said perforated region of said cover ring is overlapping at least a portion of the work piece where the work piece is in thermal contact with said work piece support;
generating a plasma using the plasma source; and
processing said work piece using the generated plasma,
wherein the cover ring does not contact the work piece while processing the work piece with the plasma.