Using interrupted Through-Silicon-Vias in integrated circuits adapted for stacking
View Patent ↗In an integrated circuit (IC) adapted for use in a stack of interconnected ICs, interrupted through-silicon-vias (TSVs) are provided in addition to uninterrupted TSVs. The interrupted TSVs provide signal paths other than common parallel paths between the ICs of the stack. This permits IC identification schemes and other functionalities to be implemented using TSVs, without requiring angular rotation of alternate ICs of the stack.
1. A method of producing an integrated circuit, comprising:
providing a semiconductor substrate;
providing on said semiconductor substrate an active circuit and interconnect layer including a plurality of constituent metal layers;
providing a plurality of vias extending through said semiconductor substrate from said active circuit and interconnect layer to a surface of said semiconductor substrate opposite said active circuit and interconnect layer;
providing a plurality of bond pads on said surface and respectively axially aligned with said vias;
electrically connecting said bond pads to said vias;
providing a plurality of top bond pads on said active circuit and interconnect layer and wherein each is respectively axially aligned with one of said vias;
electrically connecting at least one of said top bond pads to the associated vias, and
the providing the plurality of top bond pads including providing another at least one of said top bond pads that includes at least one top bond pad that is:
electrically isolated relative to the associated axially aligned via; and
electrically connected to a via that is offset from the associated axially aligned via.
2. The method of claim 1 ,
wherein the via is offset from the associated axially aligned via by a common angle of rotation.
3. The method of claim 2 , wherein the at least one of said top bond pads and the associated vias are symmetrically arranged with respect to the common angle of rotation.
4. The method of claim 3 , wherein the common angle of rotation is 90°.
5. The method of claim 3 , wherein the common angle of rotation is 180°.
6. The method of claim 1 , further comprising:
providing a solder ball on each of the plurality of top bond pads.
7. The method of claim 1 , wherein:
the electrically connecting of the at least one of said top bond pads to the associated vias comprises providing an electrical connection through at least one of the constituent metal layers.