IP Library Granted Patent US 9,147,760
Granted Patent B2
US 9,147,760 · App. 14/260,808 · Granted Sep 29, 2015

Transistors with isolation regions

Inventors: Umesh Mishra (Montecito, CA); Srabanti Chowdhury (Goleta, CA)
Assignee: Transphorm Inc.
H01L29/778H01L29/0649H01L29/0657H01L29/407H01L29/4238H01L29/7786H01L29/2003H01L29/207H01L29/402H01L29/41766H01L29/42376H01L2924/0002
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Quick Facts
Patent No.
US 9,147,760
App. No.
14/260,808
Granted
Sep 29, 2015
Kind
B2
Abstract

A transistor device is described that includes a source, a gate, a drain, a semiconductor material which includes a gate region between the source and the drain, a plurality of channel access regions in the semiconductor material on either side of the gate, a channel in the semiconductor material having an effective width in the gate region and in the channel access regions, and an isolation region in the gate region. The isolation region serves to reduce the effective width of the channel in the gate region without substantially reducing the effective width of the channel in the access regions. Alternatively, the isolation region can be configured to collect holes that are generated in the transistor device. The isolation region may simultaneously achieve both of these functions.

Claims (23)

1. A transistor device, comprising:

a source, a gate, and a drain;

a III-N semiconductor material which includes a gate region between the source and the drain;

a plurality of channel access regions in the III-N semiconductor material that are between the source and the gate and between the drain and the gate, respectively;

a channel in the III-N semiconductor material; and

a plurality of isolation regions in the III-N semiconductor material in or near a region which has a high electric field or is at a low electric potential during device operation, the plurality of isolation regions serving to improve the efficiency of hole collection from the III-N semiconductor material; wherein

the plurality of isolation regions are in the gate region and serve to reduce an effective width of the channel in the gate region without substantially reducing the effective width of the channel in the channel access regions.

2. The transistor device of claim 1 , wherein the gate contacts a surface of the isolation regions.

3. The transistor device of claim 1 , wherein each of the isolation regions has a width, and a sum of the widths of the isolation regions is between 20% and 80% the width of the source.

4. The transistor device of claim 1 , wherein each of the isolation regions has a width, and a sum of the widths of the isolation regions is between 10% and 90% the width of the source.

5. The transistor device of claim 1 , wherein the gate is on an N-face of the III-N semiconductor material.

6. A semiconductor device, comprising:

a III-N semiconductor material;

a conductive channel in the III-N semiconductor material;

a first electrode, a second electrode, and a gate, wherein the gate is between the first and second electrodes, and the III-N semiconductor material includes a gate region between the first and second electrodes; and

an isolation region in or near a region of the III-N semiconductor material which has a high electric field or is at a low electric potential during device operation, the isolation region serving to improve the efficiency of hole collection from the III-N semiconductor material; wherein

the isolation region is a p-type or nominally p-type region; and

the gate is electrically isolated from the isolation region.

7. The semiconductor device of claim 6 , wherein the device includes a plurality of the isolation regions and a plurality of channel access regions in the III-N semiconductor material, and the isolation regions further serve to reduce an effective width of the conductive channel in the gate region without substantially reducing an effective width of the conductive channel in the channel access regions.

8. The semiconductor device of claim 6 , wherein the isolation region lies beneath or near the gate.

9. The semiconductor device of claim 6 , wherein the isolation region lies beneath or near the first electrode.

10. The semiconductor device of claim 6 , wherein the isolation region lies between the gate and the first electrode.

11. The semiconductor device of claim 6 , wherein the gate is on an N-face of the III-N semiconductor material.

Assignments (4)
SECURITY INTEREST Recorded Mar 1, 2024
From: TRANSPHORM TECHNOLOGY, INC.; TRANSPHORM, INC.
To: RENESAS ELECTRONICS AMERICA INC.
Reel/Frame 066713/0531 →
CHANGE OF NAME Recorded Mar 4, 2020
From: TRANSPHORM, INC.
To: TRANSPHORM TECHNOLOGY, INC.
Reel/Frame 052091/0697 →
SECURITY INTEREST Recorded Apr 4, 2018
From: TRANSPHORM, INC.
To: NEXPERIA B.V.
Reel/Frame 045853/0159 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 8, 2014
From: MISHRA, UMESH; CHOWDHURY, SRABANTI
To: TRANSPHORM INC.
Reel/Frame 033499/0844 →
Continuity (2)
Continuation 12968704 · Dec 15, 2010
Related Publication 20140231929A1 · Aug 21, 2014