Method of making semiconductor device with distinct multiple-patterned conductive tracks on a same level
View Patent ↗A multiple-patterned semiconductor device and a method of manufacture are provided. The semiconductor device includes a conductive layer. The conductive layer includes conductive tracks which may be defined by photomasks. The conductive tracks may have quality characteristics. Distinct quality characteristics of distinct conductive tracks may be compared. Based on the comparison, signals and supply voltage may be routed on particular conductive tracks.
1. A method of manufacturing a semiconductor device, comprising:
defining a first portion of a first conductive layer with a first photomask having a first conductive track pattern;
defining a second portion of the first conductive layer with a second photomask having a second conductive track pattern, the second conductive track pattern interdigitated with the first conductive track pattern;
determining a first quality characteristic of the first conductive track pattern and a second quality characteristic of the second conductive track pattern;
comparing the first quality characteristic of the first conductive track pattern and the second quality characteristic of the second conductive track pattern; and
selecting, in response to comparing the first quality characteristic and the second quality characteristic,
a first photomask in response to determining the first quality characteristic is higher than the second quality characteristic, the first photomask configured to connect a supply voltage to a track in the second conductive track pattern and to connect a logic signal to a track in the first conductive track pattern; and
a second photomask in response to determining the first quality characteristic is not higher than the second quality characteristic, the second photomask configured to connect a supply voltage to a track in the first conductive track pattern and to connect a logic signal to a track in the second conductive track pattern.
2. The method of claim 1 , wherein the first quality characteristic of the first conductive track pattern is a first measurement for a first width of a first wire channel and the second quality characteristic of the second conductive track pattern is a second measurement for a second width of a second wire channel.
3. The method of claim 2 , wherein at least one of the first and second measurements occurs after at least one of developing a photoresist, processing a photoresist, outlining the first and second wire channels, and etching the first and second wire channels.
4. The method of claim 1 , wherein selecting the photomask provides shielding which reduces at least one of noise and delay sensitivity.
5. The method of claim 1 , further comprising etching vias to provide for a conductive path connecting supply voltage with at least one of the first and second conductive track patterns.
6. The method of claim 1 , further comprising establishing at least one second conductive layer having at least one voltage supply track adapted to deliver the at least one supply voltage.
7. The method of claim 1 , further comprising establishing at least one second conductive layer having at least one linkage adapted to electrically connect at least one of:
at least one first portion of the first conductive track pattern with at least one second portion of the first conductive track pattern; and
at least one first portion of the second conductive track pattern with at least one second portion of the second conductive track pattern.