Method of forming a reduced resistance fin structure
Methods and structures for forming a reduced resistance region of a finFET are described. According to some aspects, a dummy gate and first gate spacer may be formed above a fin comprising a first semiconductor composition. At least a portion of source and drain regions of the fin may be removed, and a second semiconductor composition may be formed in the source and drain regions in contact with the first semiconductor composition. A second gate spacer may be formed covering the first gate spacer. The methods may be used to form finFETs having reduced resistance at source and drain junctions.
1. A method of forming a FinFET, the method comprising:
forming a fin on a semiconductor substrate, the fin having a first semiconductor composition;
covering a region of the fin with an insulating layer and a dummy gate structure on the insulating layer;
forming a first gate spacer above the fin and on the insulating laver;
removing portions of the fin, the covered region of the fin forming, under the dummy gate structure, a channel region having a uniform width and substantially straight sidewalls for its entire height;
forming source and drain regions by forming a second semiconductor composition in direct abutting contact with the first semiconductor composition and with side surfaces of the insulating layer; and
forming a second gate spacer in contact with the first gate spacer.
2. The method of claim 1 , wherein the second gate spacer extends over the second semiconductor composition.
3. The method of claim 1 , wherein at least one of the first gate spacer and the second gate spacer comprises SiN X .
4. The method of claim 1 , further comprising replacing the first gate spacer and the second gate spacer with a low-k dielectric material.
5. The method of claim 4 , wherein the low-k dielectric material includes one or more of SiBCN or SiOCN.
6. The method of claim 1 , wherein a width of the fin is between approximately 3 nm and 20 nm.
7. The method of claim 1 , wherein one or more of the first and second semiconductor compositions is a III-V semiconductor.
8. The method of claim 1 , further comprising forming the second semiconductor composition by epitaxial growth.
9. The method of claim 1 , further comprising doping the second semiconductor composition to form a higher conductivity material than the first semiconductor composition.
10. The method of claim 9 , wherein the second semiconductor composition has a doping concentration between 10 18 dopants/cm 3 and 10 21 dopants/cm 3 .
11. The method of claim 1 , wherein the first semiconductor composition is undoped.
12. The method of claim 1 , further comprising replacing the dummy gate and the oxide layer with a metal gate and a high-k dielectric layer, respectively.
13. The method of claim 1 wherein the fin includes one or more of a buffer layer and a substantially defect-free layer.
14. The method of claim 1 wherein the substrate includes a buried oxide layer.
15. A method, comprising:
forming, on a semiconductor substrate, a multi-layer fin including a top layer having a first semiconductor composition;
covering a portion of the fin with a dummy gate structure;
forming a first gate spacer on the fin, the first gate spacer abutting side surfaces of the dummy gate structure;
removing exposed regions of the top layer, using the dummy gate structure as a mask, the covered portion of the fin forming a channel region under the dummy gate structure;
replacing the removed exposed regions of the top layer with a second semiconductor composition to form source and drain regions, the second semiconductor composition in direct abutting contact with the first semiconductor composition and with outer sidewalls of the first gate spacer;
forming a second gate spacer on the source and drain regions, the second gate spacer in direct abutting contact with the outer sidewalls of the first gate spacer; and
replacing the dummy gate structure with a metal gate structure.
16. The method of claim 15 wherein replacing the dummy gate structure includes:
forming a high-k gate dielectric over the channel region;
forming a metal gate; and
forming replacement spacers covering sidewalls of the metal gate.
17. The method of claim 15 wherein the second semiconductor composition has a higher conductivity than the first semiconductor composition.
18. The method of claim 15 wherein the second semiconductor composition is epitaxial.
19. The method of claim 15 wherein the second semiconductor composition is substantially defect-free.
20. The method of claim 16 wherein the replacement spacers extend vertically beyond a top surface of the metal gate.
21. A method of forming a FinFET, the method comprising:
forming a fin on a semiconductor substrate, the fin having a first semiconductor composition and including source and drain regions;
covering a region of the fin with a dummy gate structure;
forming a first gate spacer above the fin, the gate spacer having outer sidewall surfaces;
removing at least a portion of the source and drain regions of the fin, a remaining portion of the fin forming, under the dummy gate structure, a channel region having sidewalls aligned with the outer sidewall surfaces of the gate spacer;
forming, in the source and drain regions, a second semiconductor composition in direct abutting contact with the first semiconductor composition; and
forming a second gate spacer in contact with the first gate spacer.
22. The method of claim 21 , wherein the sidewalls of the channel region are substantially straight.
23. The method of claim 22 , wherein the removing entails use of an anisotropic etching process to produce the substantially straight sidewalls.