Method of manufacturing laminate
A method of manufacturing a laminate including a substrate, a support, and a release layer, the method including a preliminary treatment process of increasing temperatures of the support carried into a reaction chamber and the inside of the reaction chamber by a plasma treatment, and a release layer forming process of supplying a source gas serving as the release layer into the reaction chamber after the preliminary treatment process to form the release layer on the support.
1. A method of manufacturing a laminate which includes a substrate, a light-transmitting support that supports the substrate, and a release layer which is provided between the substrate and the support and is configured to be transformed by absorbing light with which irradiation is performed through the support, the method comprising:
a preliminary treatment process of increasing temperatures of the support carried into a reaction chamber and the inside of the reaction chamber by a plasma treatment; and
a release layer forming process of supplying a source gas serving as the release layer into the reaction chamber after the preliminary treatment process to form the release layer on the support.
2. The method of manufacturing a laminate according to claim 1 , wherein:
a preliminary processing gas including oxygen is supplied into the reaction chamber in the preliminary treatment process;
the preliminary processing gas further includes one or more gases selected from a group consisting of hydrogen, nitrogen, a fluorinated hydrocarbon, and an inert gas; and
the temperature inside the reaction chamber is increased to 120° C. or higher in the preliminary treatment process.
3. The method of manufacturing a laminate according to claim 2 , further comprising a cleaning process of cleaning the inside of the reaction chamber by a plasma treatment, after the release layer forming process, wherein:
a cleaning gas including oxygen is supplied into the reaction chamber in the cleaning process; and
the cleaning gas further includes one or more gases selected from a group consisting of hydrogen, nitrogen, a fluorinated hydrocarbon, and an inert gas.
4. The method of manufacturing a laminate according to claim 3 , wherein:
the source gas includes at least one of a hydrocarbon and a fluorinated hydrocarbon; and
a plasma CVD method is executed using a high-frequency power which is set to be larger than a power for starting a mode jump, in the release layer forming process.
5. The method of manufacturing a laminate according to claim 4 , further comprising a reaction chamber heating process of increasing a temperature of a side wall inside the reaction chamber by a plasma treatment, before the preliminary treatment process, wherein the temperature of the side wall is increased to 80° C. or higher in the reaction chamber heating process.
6. The method of manufacturing a laminate according to claim 5 , further comprising attachment of the support with the release layer to the substrate.
7. The method of manufacturing a laminate according to claim 1 , further comprising a cleaning process of cleaning the inside of the reaction chamber by a plasma treatment, after the release layer forming process.
8. The method of manufacturing a laminate according to claim 7 , wherein a cleaning gas including oxygen is supplied into the reaction chamber in the cleaning process.
9. The method of manufacturing a laminate according to claim 8 , wherein the cleaning gas further includes one or more gases selected from a group consisting of hydrogen, nitrogen, a fluorinated hydrocarbon, and an inert gas.
10. The method of manufacturing a laminate according to claim 1 , wherein a preliminary processing gas including oxygen is supplied into the reaction chamber in the preliminary treatment process.
11. The method of manufacturing a laminate according to claim 10 , wherein the preliminary processing gas further includes one or more gases selected from a group consisting of hydrogen, nitrogen, a fluorinated hydrocarbon, and an inert gas.
12. The method of manufacturing a laminate according to claim 1 , further comprising a reaction chamber heating process of increasing a temperature of a side wall inside the reaction chamber by a plasma treatment, before the preliminary treatment process.
13. The method of manufacturing a laminate according to claim 12 , wherein the temperature of the side wall is increased to 80° C. or higher in the reaction chamber heating process.
14. The method of manufacturing a laminate according to claim 1 , wherein the release layer is formed by a plasma CVD method or a plasma ALD method in the release layer forming process.
15. The method of manufacturing a laminate according to claim 1 , wherein the temperature inside the reaction chamber is increased to 120° C. or higher in the preliminary treatment process.
16. The method of manufacturing a laminate according to claim 1 , wherein the source gas includes at least one of a hydrocarbon and a fluorinated hydrocarbon.
17. The method of manufacturing a laminate according to claim 1 , wherein a plasma CVD method is executed using a high-frequency power which is set to be larger than a power for starting a mode jump, in the release layer forming process.
18. The method of manufacturing a laminate according to claim 1 , further comprising attachment of the support with the release layer to the substrate.