Layout to minimize FET variation in small dimension photolithography
View Patent ↗A semiconductor chip has shapes on a particular level that are small enough to require a first mask and a second mask, the first mask and the second mask used in separate exposures during processing. A circuit on the semiconductor chip requires close tracking between a first and a second FET (field effect transistor). For example, the particular level may be a gate shape level. Separate exposures of gate shapes using the first mask and the second mask will result in poorer FET tracking (e.g., gate length, threshold voltage) than for FETs having gate shapes defined by only the first mask. FET tracking is selectively improved by laying out a circuit such that selective FETs are defined by the first mask. In particular, static random access memory (SRAM) design benefits from close tracking of six or more FETs in an SRAM cell.
1. A semiconductor chip having a process level requiring a first gate definition mask to define a first group of FET (Field Effect Transistor) gates at a pitch and a second gate definition mask to define a second group of FET gates at the pitch, FET gates in the first group of FET gates being interdigitated with FET gates in the second group of FET gates to provide FET gates at a minimum gate pitch, comprising:
an SRAM cell comprising six FETs (Field Effect Transistors) that are required to track closely; and
all six FETs in the SRAM cell having gates defined by the first gate definition mask;
wherein the first pitch is at least twice that of the minimum gate pitch on the semiconductor chip.
2. The semiconductor chip of claim 1 , further comprising a seventh FET having a gate defined by the second gate definition mask.
3. An electronic system comprising:
a semiconductor chip requiring a first gate definition mask to define FET gates at a pitch at least twice a minimum gate pitch and a second gate definition mask to define FET gates at the pitch at least twice the minimum FET gate pitch, FETs at the minimum FET gate pitch defined by interdigitating FET gates defined by the first gate definition mask and FET gates defined by the second gate definition mask; and
the semiconductor chip further comprising a static random access memory (SRAM) which further comprises an SRAM cell further comprising six FETs;
wherein gate shapes on all six FETs are defined by the first gate definition mask.