Magnetic random access memory with perpendicular enhancement layer
View Patent ↗The present invention is directed to an MTJ memory element including a magnetic free layer structure which comprises one or more magnetic free layers that have a same variable magnetization direction substantially perpendicular to layer planes thereof; an insulating tunnel junction layer formed adjacent to the magnetic free layer structure; a magnetic reference layer structure comprising a first magnetic reference layer formed adjacent to the insulating tunnel junction layer and a second magnetic reference layer separated therefrom by a perpendicular enhancement layer with the first and second magnetic reference layers having a first fixed magnetization direction substantially perpendicular to layer planes thereof; an anti-ferromagnetic coupling layer formed adjacent to the second magnetic reference layer opposite the perpendicular enhancement layer; and a magnetic fixed layer comprising first and second magnetic fixed sublayers with the second magnetic fixed sublayer formed adjacent to the anti-ferromagnetic coupling layer opposite the second magnetic reference layer.
1. A magnetic tunnel junction (MTJ) memory element comprising:
a magnetic free layer structure including one or more magnetic free layers that have a same variable magnetization direction substantially perpendicular to layer planes thereof;
an insulating tunnel junction layer formed adjacent to said magnetic free layer structure;
a magnetic reference layer structure including a first magnetic reference layer formed adjacent to said insulating tunnel junction layer and a second magnetic reference layer separated therefrom by a perpendicular enhancement layer, said first and second magnetic reference layers having a first fixed magnetization direction substantially perpendicular to layer planes thereof;
an anti-ferromagnetic coupling layer formed adjacent to said second magnetic reference layer opposite said perpendicular enhancement layer; and
a magnetic fixed layer comprising first and second magnetic fixed sublayers with said second magnetic fixed sublayer formed adjacent to said anti-ferromagnetic coupling layer opposite said second magnetic reference layer, said first and second magnetic fixed sublayers having a second fixed magnetization direction that is substantially perpendicular to layer planes thereof and is substantially opposite to said first fixed magnetization direction.
2. The MTJ memory element according to claim 1 , wherein said first magnetic fixed sublayer has a multilayer structure formed by interleaving layer(s) of a first material with layer(s) of a second material, at least one of said first and second materials being magnetic.
3. The MTJ memory element according to claim 2 , wherein said first magnetic fixed sublayer is made of [Co/Pt], [CoFe/Pt], [Co/Pd], [CoFe/Pd], or any combination thereof.
4. The MTJ memory element according to claim 1 , wherein said second magnetic fixed sublayer has a multilayer structure formed by interleaving layer(s) of a third material with layer(s) of a fourth material, said third and fourth materials being magnetic.
5. The MTJ memory element according to claim 4 , wherein said second magnetic fixed sublayer is made of [Co/Ni], [CoFe/Ni], or any combination thereof.
6. The MTJ memory element according to claim 1 , wherein said first magnetic fixed sublayer has a multilayer structure formed by interleaving layer(s) of a first material with layer(s) of a second material, at least one of said first and second materials being magnetic, said second magnetic fixed sublayer has a multilayer structure formed by interleaving layer(s) of a third material with layer(s) of a fourth material, said third and fourth materials being magnetic.
7. The MTJ memory element according to claim 1 , wherein said second magnetic reference layer comprises a first magnetic reference sublayer formed adjacent to said perpendicular enhancement layer and a second magnetic reference sublayer formed adjacent to said anti-ferromagnetic coupling layer.
8. The MTJ memory element according to claim 7 , wherein said first magnetic reference sublayer has a multilayer structure formed by interleaving layer(s) of a fifth material with layer(s) of a sixth material, at least one of said fifth and sixth materials being magnetic.
9. The MTJ memory element according to claim 8 , wherein said first magnetic reference sublayer is made of [Co/Pt], [CoFe/Pt], [Co/Pd], [CoFe/Pd], or any combination thereof.
10. The MTJ memory element according to claim 7 , wherein said second magnetic reference sublayer has a multilayer structure formed by interleaving layer(s) of a seventh material with layer(s) of an eighth material, said seventh and eighth materials being magnetic.
11. The MTJ memory element according to claim 10 , wherein said second magnetic reference sublayer is made of [Co/Ni], [CoFe/Ni], or any combination thereof.
12. The MTJ memory element according to claim 7 , wherein said first magnetic reference sublayer has a multilayer structure formed by interleaving layer(s) of a fifth material with layer(s) of a sixth material, at least one of said fifth and sixth materials being magnetic, said second magnetic reference sublayer has a multilayer structure formed by interleaving layer(s) of a seventh material with layer(s) of an eighth material, said seventh and eighth materials being magnetic.
13. The MTJ memory element according to claim 12 , wherein said first magnetic fixed sublayer has a multilayer structure formed by interleaving layer(s) of a first material with layer(s) of a second material, at least one of said first and second materials being magnetic, said second magnetic fixed sublayer has a multilayer structure formed by interleaving layer(s) of a third material with layer(s) of a fourth material, said third and fourth materials being magnetic.
14. The MTJ memory element according to claim 1 , wherein said perpendicular enhancement layer is made of a single layer of Ta or Hf.
15. A magnetic tunnel junction (MTJ) memory element comprising:
a magnetic free layer structure including one or more magnetic free layers that have a same variable magnetization direction substantially perpendicular to layer planes thereof;
an insulating tunnel junction layer formed adjacent to said magnetic free layer structure;
a magnetic reference layer structure including a first magnetic reference layer formed adjacent to said insulating tunnel junction layer and a second magnetic reference layer separated therefrom by a perpendicular enhancement layer, said first and second magnetic reference layers having a first fixed magnetization direction substantially perpendicular to layer planes thereof;
an anti-ferromagnetic coupling layer formed adjacent to said second magnetic reference layer opposite said perpendicular enhancement layer; and
a magnetic fixed layer formed adjacent to said anti-ferromagnetic coupling layer opposite said second magnetic reference layer, said magnetic fixed layer having a second fixed magnetization direction that is substantially perpendicular to a layer plane thereof and is substantially opposite to said first fixed magnetization direction,
wherein said second magnetic reference layer comprises a first magnetic reference sublayer formed adjacent to said perpendicular enhancement layer and a second magnetic reference sublayer formed adjacent to said anti-ferromagnetic coupling layer.
16. The MTJ memory element according to claim 15 , wherein said first magnetic reference sublayer has a multilayer structure formed by interleaving layer(s) of a first material with layer(s) of a second material, at least one of said first and second materials being magnetic, said second magnetic reference sublayer has a multilayer structure formed by interleaving layer(s) of a third material with layer(s) of an fourth material, said third and fourth materials being magnetic.
17. The MTJ memory element according to claim 16 , wherein said first magnetic reference sublayer is made of [Co/Pt], [CoFe/Pt], [Co/Pd], [CoFe/Pd], or any combination thereof, said second magnetic reference sublayer is made of [Co/Ni], [CoFe/Ni], or any combination thereof.
18. A magnetic tunnel junction (MTJ) memory element comprising:
a magnetic free layer structure including first and second magnetic free layers with a perpendicular enhancement layer interposed therebetween, said first and second magnetic free layers having a same variable magnetization direction substantially perpendicular to layer planes thereof;
an insulating tunnel junction layer formed adjacent to said first magnetic free layer opposite said perpendicular enhancement layer;
a magnetic reference layer structure formed adjacent to said insulating tunnel junction layer opposite said first magnetic free layer, said magnetic reference layer structure including one or more magnetic reference layers that have a first fixed magnetization direction substantially perpendicular to layer planes thereof;
an anti-ferromagnetic coupling layer formed adjacent to said magnetic reference layer structure; and
a magnetic fixed layer comprising first and second magnetic fixed sublayers with said second magnetic fixed sublayer formed adjacent to said anti-ferromagnetic coupling layer opposite said magnetic reference layer structure, said first and second magnetic fixed sublayers having a second fixed magnetization direction that is substantially perpendicular to layer planes thereof and is substantially opposite to said first fixed magnetization direction.
19. The MTJ memory element according to claim 18 , wherein said first magnetic fixed sublayer has a multilayer structure formed by interleaving layer(s) of a first material with layer(s) of a second material, at least one of said first and second materials being magnetic, said second magnetic fixed sublayer has a multilayer structure formed by interleaving layer(s) of a third material with layer(s) of a fourth material, said third and fourth materials being magnetic.
20. The MTJ memory element according to claim 19 , wherein said first magnetic fixed sublayer is made of [Co/Pt], [CoFe/Pt], [Co/Pd], [CoFe/Pd], or any combination thereof, said second magnetic fixed sublayer is made of [Co/Ni], [CoFe/Ni], or any combination thereof.