Precursors for CVD silicon carbo-nitride films
Classes of liquid aminosilanes have been found which allow for the production of silicon carbo-nitride films of the general formula Si x C y N z . These aminosilanes, in contrast, to some of the precursors employed heretofore, are liquid at room temperature and pressure allowing for convenient handling. In addition, the invention relates to a process for producing such films. The classes of compounds are generally represented by the formulas: and mixtures thereof, wherein R and R 1 in the formulas represent aliphatic groups typically having from 2 to about 10 carbon atoms, e.g., alkyl, cycloalkyl with R and R 1 in formula A also being combinable into a cyclic group, and R 2 representing a single bond, (CH 2 ) n , a ring, or SiH 2 .
1. An aminosilane compound selected from the group having the following formulas:
2. The aminosilane of claim 1 comprising:
3. A composition comprising:
and at least one member selected from the group consisting of nitrogen, ammonia, hydrazine, and dimethylhydrazine.
4. The aminosilane of claim 1 comprising:
5. The aminosilane of claim 1 comprising:
6. The aminosilane of claim 1 comprising:
7. A composition comprising the compound of claim 1 and at least one aminosilane compound selected from the group consisting of:
and where n is 4 or 5.
8. The composition of claim 7 comprising:
9. The composition of claim 7 comprising:
10. The composition of claim 7 comprising:
11. The composition of claim 7 comprising:
wherein n is 4 or 5.
12. A composition comprising the compound of claim 1 and at least one member selected from the group consisting of:
13. The composition of claim 12 comprising:
14. The composition of claim 12 comprising:
15. The composition of claim 12 comprising:
16. A composition comprising at least one aminosilane selected from the group consisting of:
and at least one member selected from the group consisting of nitrogen, ammonia, hydrazine, and dimethylhydrazine.
17. A composition comprising the compound of claim 1 and at least one member selected from the group consisting of bis-tert-butylaminosilane, tris-iso-propylaminosilane, bis-diethylaminosilane, tris-dimethylaminosilane, and bis-iso-propylaminosilane.
18. A composition comprising the compound of claim 1 and at least one member selected from the group consisting of nitrogen, ammonia, hydrazine, and dimethylhydrazine.