Resistance-switching memory cell with multiple raised structures in a bottom electrode
A reversible resistance-switching memory cell has multiple narrow, spaced apart bottom electrode structures. The raised structures can be formed by coating a bottom electrode layer with nano-particles and etching the bottom electrode layer. The raised structures can be independent or joined to one another at a bottom of the bottom electrode layer. A resistance-switching material is provided between and above the bottom electrode structure, followed by a top electrode layer. Or, insulation is provided between and above the bottom electrode structures, and the resistance-switching material and top electrode layer are above the insulation. Less than one-third of a cross-sectional area of each resistance-switching memory cell is consumed by the one or more raised structures. When the resistance state of the memory cell is switched, there is a smaller area in the bottom electrode for a current path, so the switching resistance is higher and the switching current is lower.
1. A resistance-switching memory cell, comprising:
a substrate;
a bottom electrode layer above the substrate, the bottom electrode layer comprising a plurality of raised structures;
a resistance-switching material, a top of each raised structure of the plurality of raised structures is in contact with the resistance-switching material;
a top electrode above the resistance-switching material; and
an insulating material adjacent to and between the plurality of raised structures, wherein a top of the insulating material is below the top of each raised structure of the plurality of raised structures and the resistance-switching material extends above the plurality of raised structures and the insulating material.
2. The resistance-switching memory cell of claim 1 , wherein:
the top of the insulating material is above a bottom of each raised structure of the plurality of raised structures.
3. The resistance-switching memory cell of claim 1 , wherein:
less than one-third of a cross-sectional area of the resistance-switching memory cell is consumed by the plurality of raised structures.
4. The resistance-switching memory cell of claim 1 , wherein:
a top surface of the insulating material is adjacent to a bottom surface of the resistance-switching material.
5. The resistance-switching memory cell of claim 1 , wherein:
the plurality of raised structures are spaced apart from one another in a plurality of rows.
6. The resistance-switching memory cell of claim 1 , wherein:
the plurality of raised structures are spaced apart from one another in a first direction and in a second direction which is perpendicular to the first direction.
7. The resistance-switching memory cell of claim 1 , wherein:
the plurality of the raised structures are not joined to one another.
8. The resistance-switching memory cell of claim 1 , wherein:
the plurality of the raised structures are joined to one another at a bottom of the bottom electrode layer.
9. The resistance-switching memory cell of claim 1 , wherein:
the bottom electrode layer comprises doped polysilicon.
10. The resistance-switching memory cell of claim 1 , wherein:
the resistance-switching material comprises a phase change material.
11. The resistance-switching memory cell of claim 1 , wherein:
the resistance-switching material comprises a metal oxide.
12. A resistance-switching memory device, comprising:
a substrate;
a bottom wiring layer on the substrate comprising spaced apart wires; and
a plurality of resistance-switching memory cells formed on the substrate and aligned with the spaced apart wires of the bottom wiring layer, wherein each resistance-switching memory cell comprises:
a plurality of raised structures in a bottom electrode layer above the substrate, wherein each raised structure of the plurality of raised structures has a top, and the plurality of raised structures are spaced apart from one another in a first direction and in a second direction which is perpendicular to the first direction,
a resistance-switching material, wherein a top of each raised structure of the plurality of raised structures is in contact with the resistance-switching material;
a top electrode above the resistance-switching material; and
an insulating material between the plurality of raised structures, wherein a top of the insulating material is at a height which is below a height of the top of each raised structure of the plurality of raised structures, and the resistance-switching material extends above the plurality of raised structures and the insulating material.
13. The resistance-switching memory device of claim 12 , further comprising:
a top wiring layer comprising spaced apart wires aligned with, and in electrical contact with, rows of the top electrodes.
14. The resistance-switching memory device of claim 12 , further comprising:
a top wiring layer comprising spaced apart wires aligned with rows of the resistance-switching memory cells, the top electrodes are provided by portions of the spaced apart wires.
15. The resistance-switching memory device of claim 12 , wherein:
the resistance-switching material of each of the resistance-switching memory cells are separated from one another.
16. The resistance-switching memory device of claim 12 , wherein:
the resistance-switching memory cells as formed as pillars which are spaced apart from one another.