Implementing magnetic memory integration with CMOS driving circuits
View Patent ↗A magnetic memory integrated with complementary metal oxide semiconductor (CMOS) driving circuits and a method for implementing magnetic memory integrated with complementary metal oxide semiconductor (CMOS) driving circuits for use in Solid-State Drives (SSDs) are provided. A complementary metal oxide semiconductor (CMOS) wafer is provided, and a magnetic memory is formed on top of the CMOS wafer providing a functioning magnetic memory chip.
1. A method for implementing magnetic memory integration with complementary metal oxide semiconductor (CMOS) driving circuits comprising:
forming a complementary metal oxide semiconductor (CMOS) wafer;
forming a magnetic memory on top of the CMOS wafer to provide a functioning magnetic memory chip includes performing a preliminary etch for exposing alignment marks in the CMOS wafer and using said alignment marks for growing pillars of magnetic pillar memory cells; and
forming a plurality of conductive filaments for providing electrical connections between said CMOS wafer and said magnetic memory; said conductive filaments providing robustness against misalignment between said CMOS wafer and said magnetic memory.
2. The method as recited in claim 1 wherein forming said complementary metal oxide semiconductor (CMOS) wafer includes growing a CMOS wafer in a first process.
3. The method as recited in claim 1 wherein forming said magnetic memory on top of the CMOS wafer to provide a functioning magnetic memory chip includes forming a magnetic memory wafer.
4. The method as recited in claim 3 includes bonding the CMOS wafer and said magnetic memory wafer together.
5. The method as recited in claim 3 wherein forming said magnetic memory wafer includes forming a three-dimensional (3D) scalable magnetic memory array.
6. The method as recited in claim 5 wherein forming said three-dimensional (3D) scalable magnetic memory array includes a single etching step forming said magnetic pillar memory cells.
7. The method as recited in claim 5 wherein forming said three-dimensional (3D) scalable magnetic memory array includes depositing an interlayer dielectric (IDL) stack of word planes separated by a respective IDL; forming a plurality of pillar holes; coating said pillar holes with an oxide barrier, and depositing a first conductor M 1 , and a second conductor M 2 inside said pillar holes forming said magnetic pillar memory cells.
8. The method as recited in claim 7 includes sharing each said respective word plane by all magnetic pillar memory cells in a respective plane level, and sharing a bit line by only said magnetic pillar memory cells inside said respective pillar holes.
9. The method as recited in claim 3 includes treating said magnetic memory wafer and the CMOS wafer with a finish enabling a capability to develop said conductive filaments by electric field.
10. The method as recited in claim 9 includes bonding said magnetic memory and said CMOS wafer, and sawing into a row of dices.
11. The method as recited in claim 10 includes activating said magnetic memory and said CMOS wafer dices to form said conductive filaments to provide electrical connections for the functioning magnetic memory chip.
12. The method as recited in claim 1 wherein said pillars of magnetic memory cells includes a first conductor M 1 being formed of a magnetic material, and said second conductor M 2 being more electrically conductive than said conductor M 1 , and includes growing said second conductor M 2 , coating said second conductor M 2 with a non-magnetic spacer layer, and growing said first magnetic conductor M 1 over said coated second conductor M 2 .
13. The method as recited in claim 1 includes depositing an interlayer dielectric (IDL) stack of word planes separated by a respective IDL.
14. The method as recited in claim 13 includes sharing each said respective word plane by all magnetic pillar memory cells in a respective plane level, and sharing a bit line only within said pillars of magnetic memory cells.
15. The method as recited in claim 13 includes forming vias in said IDL stack, and forming other conductive electrical connections.
16. A magnetic memory integrated with complementary metal oxide semiconductor (CMOS) driving circuits comprising:
a complementary metal oxide semiconductor (CMOS) wafer; said CMOS wafer including alignment marks exposed by a preliminary etch;
a magnetic memory formed on top of the CMOS wafer providing a functioning magnetic memory chip, said magnetic memory including an array of pillars grown on said alignment marks forming magnetic pillar memory cells; and
a plurality of conductive filaments for providing electrical connections between said CMOS wafer and said magnetic memory; said conductive filaments providing robustness against misalignment between said CMOS wafer and said magnetic memory.
17. The magnetic memory as recited in claim 16 wherein said magnetic memory formed on top of the CMOS wafer includes said array of pillars of magnetic pillar memory cells and an interlayer dielectric (IDL) stack of word planes separated by a respective IDL.
18. The magnetic memory as recited in claim 16 wherein said magnetic memory formed on top of the CMOS wafer includes a magnetic memory wafer including a magnetic memory array bonded to the complementary metal oxide semiconductor (CMOS) wafer.