Tilted synthetic antiferromagnet polarizer/reference layer for STT-MRAM bits
View Patent ↗Embodiments disclosed herein generally relate to a multilayer magnetic device, and specifically to a spin-torque transfer magnetoresistive random access memory (STT-MRAM) device which provides for a reduction in the amount of current required for switching individual bits. As such, a polarizing reference layer consisting of a synthetic antiferromagnet (SAF) structure with an in-plane magnetized ferromagnet film indirectly exchange coupled to a magnetic film with perpendicular magnetic anisotropy (PMA) is disclosed. By tuning the exchange coupling strength and the PMA, the layers of the SAF may both be canted such that either may be used as a tilted polarizer for either an in-plane free layer or a free layer with PMA.
1. A multilayer magnetic device, comprising:
a reference layer structure comprising:
an in-plane ferromagnet layer, wherein the in-plane ferromagnet layer has an equilibrium axis parallel with a first surface;
a nonmagnetic metal layer disposed on the first surface of the in-plane ferromagnet layer; and
a perpendicular magnetic anisotropy ferromagnet layer disposed on the nonmagnetic metal layer, wherein the perpendicular magnetic anisotropy ferromagnet layer has an equilibrium axis perpendicular to the first surface, wherein magnetizations of both the in-plane ferromagnet layer and the perpendicular magnetic anisotropy ferromagnet layer are each tilted away from respective equilibrium axes, and wherein the in-plane ferromagnet layer maintains a saturation magnetization (M S ) between about 1000 emu/cm 3 and about 1300 emu/cm 3 .
2. A multilayer magnetic device, comprising:
a reference layer structure comprising:
an in-plane ferromagnet layer, wherein the in-plane ferromagnet layer has an equilibrium axis parallel with a first surface;
a nonmagnetic metal layer disposed on the first surface of the in-plane ferromagnet layer; and
a perpendicular magnetic anisotropy ferromagnet layer disposed on the nonmagnetic metal layer, wherein the perpendicular magnetic anisotropy ferromagnet layer has an equilibrium axis perpendicular to the first surface, wherein magnetizations of both the in-plane ferromagnet layer and the perpendicular magnetic anisotropy ferromagnet layer are each tilted away from respective equilibrium axes, and wherein the perpendicular magnetic anisotropy ferromagnet layer maintains an anisotropy energy between about 1×10 5 erg/cm 3 and about 5×10 7 erg/cm 3 .
3. A magnetoresistive random access memory storage device, comprising:
a reference layer structure, comprising:
a first layer, comprising an in-plane ferromagnet layer or a tilted perpendicular magnetic anisotropy polarizing layer, wherein the in-plane ferromagnet layer has an equilibrium axis parallel with a first surface, wherein the tilted perpendicular magnetic anisotropy polarizing layer has an equilibrium axis perpendicular to the first surface;
a nonmagnetic metal layer disposed on the first surface of the first layer, wherein the metal layer comprises ruthenium; and
a perpendicular magnetic anisotropy ferromagnet layer disposed on the metal layer, wherein the perpendicular magnetic anisotropy ferromagnet layer has an equilibrium axes perpendicular to the first surface, wherein magnetizations of both the first layer and the perpendicular magnetic anisotropy ferromagnet layer are each tilted away from respective equilibrium axes;
a spacer layer; and
a free layer, wherein the spacer layer is coupled to the reference layer structure and the free layer, wherein the perpendicular magnetic anisotropy ferromagnet layer maintains a saturation magnetization (M S ) greater than about 500 emu/cm 3 and an anisotropy energy between about 1×10 5 erg/cm 3 and about 5×10 7 erg/cm 3 .
4. A magnetoresistive random access memory storage device, comprising:
a reference layer structure, comprising:
a first layer, comprising an in-plane ferromagnet layer or a tilted perpendicular magnetic anisotropy polarizing layer, wherein the in-plane ferromagnet layer has an equilibrium axis parallel with a first surface, wherein the tilted perpendicular magnetic anisotropy polarizing layer has an equilibrium axis perpendicular to the first surface;
a nonmagnetic metal layer disposed on the first surface of the first layer, wherein the metal layer comprises ruthenium; and
a perpendicular magnetic anisotropy ferromagnet layer disposed on the metal layer, wherein the perpendicular magnetic anisotropy ferromagnet layer has an equilibrium axes perpendicular to the first surface, wherein magnetizations of both the first layer and the perpendicular magnetic anisotropy ferromagnet layer are each tilted away from respective equilibrium axes;
a spacer layer; and
a free layer, wherein the spacer layer is coupled to the reference layer structure and the free layer, wherein the nonmagnetic metal layer maintains an exchange coupling strength between about 0.1 erg/cm 2 and about 1 erg/cm 2 , and wherein the metal layer has a thickness of between about 2 angstroms and about 10 angstroms.