Packaging substrate and method for manufacturing same
A method for manufacturing a packaging substrate includes: patterning a first photo-resisting layer having first openings on a copper foil layer to expose portions of the copper foil layer; patterning a removable second photo-resisting layer having second openings on the first photo-resisting layer to expose the first openings; filling copper into the first and second openings to form base portions and a first wiring layer; orderly forming a first dielectric layer and a second wiring layer on the first wiring layer; patterning a removable third photo-resisting layer comprising covering portions opposite to the base portions on the copper foil layer; and etching the copper foil layer to form protruding portions connected to and corresponding to the base portions to define a copper pillar bump, a size of the copper pillar bump gradually increasing from the protruding portions to the base portions.
1. A method for manufacturing a packaging substrate, comprising:
patterning a first photo-resisting layer on a copper foil layer, the first photo-resisting layer defining a plurality of first openings to expose portions of the copper foil layer;
patterning a second photo-resisting layer on the first photo-resisting layer, the patterned second photo-resisting layer defining a plurality of second openings exposing the first openings;
filling copper into the first openings and the second openings, with base portions formed in the first openings and a first wiring layer in the second openings;
removing the second photo-resisting layer;
orderly forming a first dielectric layer and a second wiring layer on the first wiring layer;
patterning a third photo-resisting layer on the copper foil layer, the third photo-resisting layer facing away from the first photo-resisting layer, the third photo-resisting layer comprising a plurality of covering portions opposite to the base portions, and a size of each covering portion being less than a size of the corresponding base portion;
etching the copper foil layer to form a plurality of protruding portions connected to the base portions, each of the protruding portions spatially corresponding to a respective one of the base portions, each pair of base portion and protruding portion forming a copper pillar bump, a size of the copper pillar bump gradually increasing from the protruding portions to the base portions; and
removing the third photo-resisting layer.
2. The method of claim 1 , wherein after the first photo-resisting layer is formed on the copper foil layer and before the second photo-resisting layer is formed on the first photo-resisting layer, a first conductive layer is formed on exposed surfaces of the first photo-resisting layer and the copper foil layer, the second photo-resisting layer is formed on the first conductive layer.
3. The method of claim 2 , wherein after the second photo-resisting layer is removed and before the first dielectric layer is formed on the first wiring layer, the first conductive layer covered by the second photo-resisting layer is removed.
4. The method of claim 1 , wherein after the first dielectric layer and the second wiring layer are orderly formed on the first wiring layer, the second dielectric layer and the third wiring layer are orderly formed on the second wiring layer.
5. The method of claim 4 , wherein after the second dielectric layer and the third wiring layer are orderly formed on the second wiring layer, a solder masking layer is formed on the third wiring layer, parts of the third wiring layer exposing from the solder masking layer server as solder pads.
6. The method of claim 1 , wherein after the third photo-resisting layer is removed, the first photo-resisting layer is removed.
7. A method for manufacturing a packaging substrate, comprising:
attaching two copper foil layers on two opposite sides of a supporting plate;
patterning a first photo-resisting layer on each of the copper foil layers, the first photo-resisting layer defining a plurality of first openings to expose portions of each copper foil layer;
patterning a second photo-resisting layer on the first photo-resisting layer, the patterned second photo-resisting layer defining a plurality of second openings exposing the first openings;
filling the first openings and the second openings with copper, with base portions formed in the first openings and a first wiring layer in the second openings;
removing the second photo-resisting layer;
orderly forming a first dielectric layer and a second wiring layer on the first wiring layer to obtain a multilayer substrate, the multilayer substrate comprising the copper foil layer, the first photo-resisting layer, the first wiring layer, the first dielectric layer, and the second wiring layer;
peeling the multilayer substrate off from the supporting plate;
patterning a third photo-resisting layer on the copper foil layer, the third photo-resisting layer facing away from the first photo-resisting layer, the third photo-resisting layer comprising a plurality of covering portions opposite to the base portions, and a size of each covering portion being less than a size of the corresponding base portion;
etching the copper foil layer to form a plurality of protruding portions connected to the base portion, each of the protruding portions spatially corresponding to a respective one of the base portions, each pair of base portion and protruding portion forming a copper pillar bump, a size of the copper pillar bump gradually increasing from the protruding portions to the base portions; and
removing the third photo-resisting layer.
8. The method of claim 7 , wherein after the third photo-resisting layer is removed, the first photo-resisting layer is removed.