Laser assisted transfer welding process
View Patent ↗A method of printing transferable components includes pressing a stamp including at least one transferable semiconductor component thereon on a target substrate such that the at least one transferable component and a surface of the target substrate contact opposite surfaces of a conductive eutectic layer. During pressing of the stamp on the target substrate, the at least one transferable component is exposed to electromagnetic radiation that is directed through the transfer stamp to reflow the eutectic layer. The stamp is then separated from the target substrate to delaminate the at least one transferable component from the stamp and print the at least one transferable component onto the surface of the target substrate. Related systems and methods are also discussed.
1. A method of printing transferable components, the method comprising:
providing a eutectic layer comprising a conductive material on a surface of a target substrate;
providing a transfer stamp having front and back opposing sides and a plurality of protruding posts extending from the front side that uses kinetic or shear assisted control of adhesion to transfer arrays of semiconductor dies from a source wafer to a target substrate;
providing two or more transferable semiconductor components on a source wafer, wherein the two or more transferable semiconductor components comprise two or more semiconductor dies;
pressing two or more posts of the plurality of protruding posts against the two or more transferable semiconductor components on the source wafer to adhere the two or more transferable semiconductor components to the two or more posts of the transfer stamp, respectively;
pressing the two or more posts with the two or more transferable semiconductor components against the eutectic layer on a side of the eutectic layer opposite the target substrate;
during pressing of the two or more posts on the target substrate, exposing the two or more transferable semiconductor components to electromagnetic radiation directed through the two or more posts to reflow the eutectic layer; and then
separating the two or more posts from the target substrate to delaminate the two or more transferable semiconductor components from the transfer stamp and print the two or more transferable semiconductor components onto the surface of the target substrate, wherein pressing the stamp includes applying external pressure to the back side of the stamp.
2. The method of claim 1 , wherein the target substrate has a non-planar surface and the eutectic layer reflows to provide a substantially planar surface to which the transferable component is bonded.
3. The method of claim 1 , wherein the target substrate is at least one of a non-planar substrate, an unpolished ceramic substrate, an unpolished polysilicon substrate, an unpolished metal substrate, a printed circuit board, and a plastic substrate.
4. The method of claim 1 , wherein the eutectic layer is a self-planarizing layer.
5. The method of claim 1 , wherein at least one of the opposite surfaces of the eutectic layer is non-planar.
6. The method of claim 1 , wherein the transfer stamp includes a transparent portion that is at least partially aligned in plan view with the two or more transferable semiconductor components.
7. The method of claim 1 , wherein the electromagnetic radiation is laser radiation.
8. The method of claim 1 , the method further comprising selectively exposing some but not all of the two or more transferable semiconductor components to the electromagnetic radiation and delaminating from the transfer stamp only the exposed transferable semiconductor components.
9. The method of claim 1 , wherein the eutectic layer is a multi-layer stack including at least two different layers.
10. The method of claim 1 , wherein the eutectic layer has a first portion on the surface of the target substrate comprising a first eutectic stack and a second portion on the surface of the target substrate different from the first portion comprising a second eutectic stack different from the first eutectic stack,
wherein the second portion is between respective ones of the two or more transferable semiconductor components and the target substrate, and
wherein the first portion is adjacent to the second portion, and the first eutectic stack forms a bond between a semiconductor component and the target substrate.
11. The method of claim 10 , further comprising selectively exposing to electromagnetic radiation the first eutectic stack to reflow the first eutectic stack without reflowing the second eutectic stack.
12. The method of claim 10 , wherein the first eutectic stack has a higher melting temperature than the second eutectic stack.
13. The method of claim 10 , wherein the first eutectic stack includes a metal alloy and the second eutectic stack includes a metal-semiconductor alloy.
14. The method of claim 1 , further comprising identifying at least one of the two or more transferable semiconductor components as defective and other transferable semiconductor components as functional and selectively exposing the functional transferable semiconductor components of the two or more transferable semiconductor components to the electromagnetic radiation and delaminating from the stamp only the functional transferable semiconductor components.
15. The method of claim 1 , wherein the eutectic layer provides an electrical connection between respective ones of the two or more transferable semiconductor components and a metal interconnection line on the target substrate.
16. The method of claim 1 , wherein the two or more transferable semiconductor components comprise one or more metal fingers protruding from a surface thereof and the eutectic layer on the target substrate is in contact with the metal fingers during pressing of the transfer stamp on the target substrate.