Capping dielectric structures for transistor gates
The present description relates to the field of fabricating microelectronic transistors, including non-planar transistors, for microelectronic devices. Embodiments of the present description relate to the formation a recessed gate electrode capped by a substantially void-free dielectric capping dielectric structure which may be formed with a high density plasma process.
1. A method of fabricating a transistor gate, comprising:
forming a pair of gate spacers;
forming a gate electrode disposed between and contacting the pair of gate spacers;
removing a portion of the gate electrode to form a recess;
high density plasma depositing a capping dielectric structure within the recess on a top surface of the recessed gate electrode and between the pair of gate spacers;
forming a source/drain region;
forming at least one dielectric material over the source/drain region, the non-planar transistor gate spacers, and the capping dielectric structure; and
forming a contact opening through the at least one dielectric material to expose at least a portion of the source/drain region and which removes a portion of the capping dielectric structure.
2. The method of claim 1 , wherein high density plasma depositing the capping dielectric structure comprises high density plasma depositing a silicon nitride capping dielectric structure.
3. The method of claim 1 , wherein high density plasma depositing the capping dielectric structure comprises high density plasma depositing a silicon carbide capping dielectric structure.
4. The method of claim 1 , wherein high density plasma depositing the capping dielectric structure comprises high density plasma depositing the capping dielectric structure at a temperature between about 300° C. and 600° C.
5. A method comprising:
forming a non-planar transistor fin;
forming a pair of non-planar transistor gate spacers adjacent the sacrificial non-planar transistor fin;
depositing conductive gate material between and contacting the non-planar transistor gate spacers;
removing a portion of the conductive gate material to form a recess between the non-planar transistor gate spacers;
forming a capping dielectric structure within the recess by high density plasma depositing a dielectric material;
forming a source/drain region;
forming at least one dielectric material over the source/drain region, the non-planar transistor gate spacers, and the capping dielectric structure; and
forming a contact opening through the at least one dielectric material to expose at least a portion of the source/drain region and which removes a portion of the capping dielectric structure.
6. The method of claim 5 , wherein high density plasma depositing the capping dielectric structure comprises high density plasma depositing a silicon nitride capping dielectric structure.
7. The method of claim 5 , wherein high density plasma depositing the capping dielectric structure comprises high density plasma depositing a silicon carbide capping dielectric structure.
8. The method of claim 5 , wherein high density plasma depositing the capping dielectric structure comprises high density plasma depositing the capping dielectric structure at a temperature between about 300° C. and 600° C.
9. The method of claim 5 , further comprising forming a gate dielectric adjacent the non-planar transistor fin.
10. A method comprising:
forming a sacrificial non-planar transistor gate over a non-planar transistor fin;
depositing a dielectric material layer over the sacrificial non-planar transistor gate and the non-planar transistor fin;
forming non-planar transistor gate spacers from a portion of the dielectric material layer adjacent the sacrificial non-planar transistor gate;
forming a source/drain region;
removing the sacrificial non-planar transistor gate to form a gate trench between the non-planar transistor gate spacers and expose a portion of the non-planar transistor fin;
forming a gate dielectric adjacent the non-planar transistor fin within the gate trench;
depositing conductive gate material within the gate trench;
removing a portion of the conductive gate material to form a recess between the non-planar transistor gate spacers;
forming a capping dielectric structure within the recess by high density plasma depositing a dielectric material;
forming at least one dielectric material over the source/drain region, the non-planar transistor gate spacers, and the capping dielectric structure; and
forming a contact opening through the at least one dielectric material to expose at least a portion of the source/drain region and which removes a portion of the capping dielectric structure.
11. The method of claim 10 , wherein high density plasma depositing the capping dielectric structure comprises high density plasma depositing a silicon nitride capping dielectric structure.
12. The method of claim 10 , wherein high density plasma depositing the capping dielectric structure comprises high density plasma depositing a silicon carbide capping dielectric structure.
13. The method of claim 10 , wherein high density plasma depositing the capping dielectric structure comprises high density plasma depositing the capping dielectric structure at a temperature between about 300° C. and 600° C.