Carrying method and bonding apparatus

1. A carrying method comprising:

a support carrying-in stage of carrying a support having an adhesive layer formed on a surface on a lower side thereof in an overlapping chamber;

a support transferring stage of supporting from below and upwardly moving the support carried in the overlapping chamber by a supporting pin that can move in a vertical direction, and transferring the support to a holding member for holding the support;

a substrate carrying-in stage of carrying a substrate in the overlapping chamber after the support transferring stage;

a heating stage of supporting and downwardly moving the substrate by the supporting pin, and heating the substrate by a heating portion provided on a lower portion of the overlapping chamber;

an overlapping stage of overlapping the substrate and the support after the heating stage;

a first carrying step of carrying the substrate and the support which are overlapped from the overlapping chamber in which overlapping between the substrate and the support is performed to a bonding chamber in which bonding between the substrate and the support is performed by a first robot arm;

a second carrying step of carrying a bonded laminate from the bonding chamber to the overlapping chamber by the first robot arm;

a transferring step of directly transferring the laminate carried by the first robot arm to the overlapping chamber, the overlapping chamber including the supporting pin, from the first robot arm to a second robot arm; and

a carrying-out step of carrying-out the laminate transferred to the second robot arm, from the overlapping chamber to the outside.

2. The carrying method according to claim 1 , wherein the first robot arm includes a frame portion and a supporting member,

the laminate is carried by the first robot arm in a state in which the frame portion surrounds a portion of a circumference of the laminate and the supporting member supports the laminate from below, and

the laminate held by the first robot arm is extracted from a side which is not surrounded by the frame portion in the circumference of the laminate by the second robot arm.

3. The carrying method according to claim 1 , further comprising bonding the substrate and the support which are overlapped in the bonding chamber after carrying the substrate and the support which are overlapped from the overlapping chamber, and before carrying the bonded laminate from the bonding chamber to the overlapping chamber by the first robot arm.

4. The carrying method according to claim 1 , wherein a heating temperature of the heating portion is a temperature at which at least a portion of the substrate and the support is fused by the adhesive layer in the overlapping, and a temperature at which heating of the supporting pin to a temperature at which the supporting pin is fused to the adhesive layer formed on a surface on the lower side of the carried support is prevented in the support transferring stage.