IP Library Granted Patent US 9,530,837
Granted Patent B2
US 9,530,837 · App. 14/966,927 · Granted Dec 27, 2016

Integrated circuitry and methods of forming transistors

Inventor: Michael A. Smith (Boise, ID)
Assignee: Micron Technology, Inc.
H01L29/063H01L21/265H01L21/26513H01L21/82385H01L21/823412H01L21/823418H01L21/823456H01L27/0207H01L27/0617H01L27/085H01L27/088H01L27/092H01L27/0922H01L27/11526H01L27/11573H01L29/0653H01L29/0873H01L29/66575H01L29/66659H01L29/66825H01L29/66833H01L29/788H01L29/7833H01L29/7835H01L29/792H01L27/11531
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Quick Facts
Patent No.
US 9,530,837
App. No.
14/966,927
Granted
Dec 27, 2016
Kind
B2
Abstract

Some embodiments include integrated circuits having first and second transistors. The first transistor is wider than the second transistor. The first and second transistors have first and second active regions, respectively. Dielectric features are associated with the first active region and break up the first active region. The second active region is not broken up to the same extent as the first active region. Some embodiments include methods of forming transistors. Active areas of first and second transistors are formed. The active area of the first transistor is wider than the active area of the second transistor. Dielectric features are formed in the active area of the first transistor. The active area of the first transistor is broken up to a different extent than the active area of the second transistor. The active areas of the first and second transistors are simultaneously doped.

Claims (10)

1. An integrated circuit, comprising:

first, second and third transistors supported by a silicon-containing substrate;

the first transistor being wider than the second transistor;

the first and second transistors comprising first and second active regions, respectively; dielectric features being associated with the first active region and breaking up the first active region; the second active region not being broken up to the same extent as the first active region; and

the third transistor being wider than the first transistor; dielectric features being associated with the third active region and breaking up the third active region; the third active region being broken up to a different extent than the first active region.

2. The integrated circuit of claim 1 wherein the first, second and third transistors are high-voltage transistors.

3. The integrated circuit of claim 1 wherein the first, second and third transistors are electrically coupled to a memory array.

4. The integrated circuit of claim 1 further comprising a fourth transistor less wide than the second transistor and comprising a fourth active region; and wherein the fourth active region is not broken up.

5. The integrated circuit of claim 1 wherein the dielectric features associated with the first active region are first dielectric features, and wherein the first dielectric features are arranged on both sides of a gate of the first transistor, with the first dielectric features on one side of the gate being a mirror image of the first dielectric features on an opposing side of the gate.

6. The integrated circuit of claim 1 wherein the dielectric features associated with the first active region are first dielectric features, and wherein the first dielectric features are not symmetrically distributed on one side of a gate of the first transistor relative to an opposing side of the gate.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
Continuity (3)
Continuation 14702571 · May 1, 2015
Division 13897047 · May 17, 2013
Related Publication 20160099305A1 · Apr 7, 2016