IP Library Granted Patent US 10,461,059
Granted Patent B2
US 10,461,059 · App. 15/007,615 · Granted Oct 29, 2019

Stacked semiconductor die assemblies with improved thermal performance and associated systems and methods

Inventors: Michel Koopmans (Boise, ID); Shijian Luo (Boise, ID); David R. Hembree (Boise, ID)
Assignee: Micron Technology, Inc.
H01L25/0652H01L23/373H01L23/5226H01L24/17H01L24/81H01L25/0657H01L25/18H01L25/50H01L23/3675H01L23/3677H01L23/49811H01L23/49833H01L24/13H01L24/16H01L24/32H01L24/73H01L24/92H01L2224/131H01L2224/133H01L2224/13025H01L2224/1329H01L2224/13111H01L2224/13124H01L2224/13147H01L2224/13155H01L2224/16146H01L2224/16227H01L2224/17181H01L2224/32145H01L2224/32225H01L2224/73204H01L2224/73253H01L2224/92125H01L2225/06513H01L2225/06517H01L2225/06541H01L2225/06565H01L2225/06568H01L2225/06589H01L2924/1033H01L2924/10253H01L2924/14H01L2924/1431H01L2924/1434H01L2924/1436H01L2924/1437H01L2924/1438H01L2924/15156H01L2924/15192H01L2924/15311H01L2924/15321H01L2924/16152H01L2924/16251H01L2924/19041H01L2924/19042H01L2924/19043H01L2924/19105
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Quick Facts
Patent No.
US 10,461,059
App. No.
15/007,615
Granted
Oct 29, 2019
Kind
B2
Abstract

Stacked semiconductor die assemblies with improved thermal performance and associated systems and methods are disclosed herein. In one embodiment, a semiconductor die assembly can include a stack of semiconductor dies and a thermally conductive casing at least partially enclosing the stack of semiconductor dies within an enclosure. A package substrate carries the thermally conductive casing, and an interposer is disposed between the thermally conductive casing and the stack of semiconductor dies. A peripheral portion of the interposer extends laterally beyond the stack of semiconductor dies and is coupled to a plurality of conductive members interposed between the peripheral portion and the package substrate.

Claims (43)

1. A semiconductor die assembly, comprising:

a thermally conductive casing;

a package substrate comprising a plurality of first raised bond pads that each have a first vertical height, wherein the package substrate and the thermally conductive casing together define an enclosure;

an interposer having a front side surface and an opposing back side surface, the back side surface attached to the thermally conductive casing within the enclosure and the front side surface comprising a plurality of second raised bond pads that each have a second vertical height;

a stack of semiconductor dies having a stack height disposed between the front side surface of the interposer and the package substrate within the enclosure; and

a plurality of conductive members interposed between the plurality of first raised bond pads and the plurality of second raised bond pads, wherein each conductive member of the plurality of conductive members include a solder bump having a third vertical height, and wherein a sum of the first, second, and third vertical heights is about equal to or greater than the stack height of the stack of semiconductor dies.

2. The semiconductor die assembly of claim 1 , wherein individual conductive members are disposed between individual first raised bond pads and individual second raised bond pads.

3. The semiconductor die assembly of claim 1 , wherein a peripheral portion of the interposer extends laterally beyond the stack of semiconductor dies, and wherein the front side surface of the peripheral portion comprises the plurality of second raised bond pads.

4. The semiconductor die assembly of claim 1 , wherein the stack of semiconductor dies includes a stack of memory dies and a logic die interposed between the stack of memory dies and the interposer.

5. The semiconductor die assembly of claim 1 wherein the back side surface of the interposer is attached to the thermally conductive casing via an interface material that extends between the thermally conductive casing and the entire back side surface.

6. The semiconductor die assembly of claim 1 wherein the interposer does not include interconnects extending between the front side and the back side.

7. The semiconductor die assembly of claim 1 , further comprising an underfill material extending between the interposer and at least two or more semiconductor dies of the stack of semiconductor dies.

8. The semiconductor die assembly of claim 1 , wherein the thermally conductive casing includes:

a first portion attached to the back side surface of the interposer; and

a second portion extending vertically between the first portion and the package substrate, wherein the second portion is attached to an outer surface of the package substrate.

9. The semiconductor die assembly of claim 1 , further comprising:

an interface material interposed between the package substrate and the stack of semiconductor dies.

10. The semiconductor die assembly of claim 9 , wherein:

the interface material is electrically insulative;

the stack of semiconductor dies includes an outermost die having a plurality of through-substrate interconnects extending therethrough; and

the plurality of through-substrate interconnects contacts the interface material.

11. The semiconductor die assembly of claim 1 , wherein the stack of semiconductor dies further comprises:

a stack of memory dies having a first footprint; and

a logic die having a second footprint that is larger than the first footprint along at least one axis of the stack of memory dies.

12. The semiconductor die assembly of claim 11 , wherein the interposer has a third footprint that is larger than the second footprint along at least one axis of the logic die.

13. The semiconductor die assembly of claim 1 , wherein the solder bump includes a metal solder ball.

14. A semiconductor die assembly, comprising:

a thermally conductive casing;

a package substrate comprising a plurality of first raised bond pads that each have a first vertical height, wherein the package substrate and the thermally conductive casing together define an enclosure;

an interposer having a front side surface and an opposing back side surface, the back side surface attached to the thermally conductive casing within the enclosure and the front side surface comprising a plurality of second raised bond pads that each have a second vertical height, wherein the front side surface of the interposer comprises a redistribution network;

a stack of semiconductor dies having a stack height disposed between the front side surface of the interposer and the package substrate within the enclosure; and

a plurality of conductive members interposed between the plurality of first raised bond pads and the plurality of second raised bond pads, wherein each conductive member of the plurality of conductive members include a solder bump having a third vertical height, and wherein a sum of the first, second, and third vertical heights is about equal to or greater than the stack height of the stack of semiconductor dies.

15. The semiconductor die assembly of claim 14 , wherein the redistribution network includes conductive traces, bond pads, conductive structures, or a combination thereof.

16. The semiconductor die assembly of claim 14 , wherein the redistribution network is configured to couple the plurality of second raised bond pads with a plurality of bond pads of the interposer, the plurality of bond pads coupled with a plurality of interconnects of the stack of semiconductor dies.

17. A semiconductor die assembly, comprising:

a thermally conductive casing;

a package substrate comprising a plurality of first raised bond pads that each have a first vertical height, wherein the package substrate and the thermally conductive casing together define an enclosure;

an interposer having a front side surface and an opposing back side surface, the back side surface attached to the thermally conductive casing within the enclosure and the front side surface comprising a plurality of second raised bond pads that each have a second vertical height, wherein the front side surface of the interposer comprises one or more circuit elements;

a stack of semiconductor dies having a stack height disposed between the front side surface of the interposer and the package substrate within the enclosure; and

a plurality of conductive members interposed between the plurality of first raised bond pads and the plurality of second raised bond pads, wherein each conductive member of the plurality of conductive members include a solder bump having a third vertical height, and wherein a sum of the first, second, and third vertical heights is about equal to or greater than the stack height of the stack of semiconductor dies.

18. The semiconductor die assembly of claim 17 , wherein the one or more circuit elements include large-area metal capacitors, large-area metal inductors, or both.

19. The semiconductor die assembly of claim 17 , wherein the one or more circuit elements are configured to couple the plurality of second raised bond pads with a plurality of bond pads of the interposer, the plurality of bond pads coupled with a plurality of interconnects of the stack of semiconductor dies.

20. The semiconductor die assembly of claim 17 , wherein the one or more circuit elements are configured to control a voltage provided to the stack of semiconductor dies.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 27, 2016
From: KOOPMANS, MICHEL; LUO, SHIJIAN; HEMBREE, DAVID R.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 037597/0373 →
Cited By (20)
US 12,191,233 US 12,191,234 US 12,191,235 US 12,199,011 US 12,261,099 US 12,266,545 US 12,283,490 US 12,322,677 US 12,336,141 US 12,341,083 US 12,368,087 US 12,406,934 US 12,412,808 US 12,500,138 US 12,513,855 US 12,525,506 US 12,532,432 US 12,610,819 US 12,622,272 US 12,628,649