Semiconductor package using a coreless signal distribution structure
View Patent ↗A semiconductor package using a coreless signal distribution structure (CSDS) is disclosed and may include a CSDS comprising at least one dielectric layer, at least one conductive layer, a first surface, and a second surface opposite to the first surface. The semiconductor package may also include a first semiconductor die having a first bond pad on a first die surface, where the first semiconductor die is bonded to the first surface of the CSDS via the first bond pad, and a second semiconductor die having a second bond pad on a second die surface, where the second semiconductor die is bonded to the second surface of the CSDS via the second bond pad. The semiconductor package may further include a metal post electrically coupled to the first surface of the CSDS, and a first encapsulant material encapsulating side surfaces and a surface opposite the first die surface of the first semiconductor die, the metal post, and a portion of the first surface of the CSDS.
1. A semiconductor device comprising:
a coreless signal distribution structure comprising at least one dielectric layer, at least one conductive layer, a first surface, and a second surface opposite to the first surface;
a first semiconductor die having a first bond pad on a first die surface, the first semiconductor die bonded to the first surface of the coreless signal distribution structure via the first bond pad;
a second semiconductor die having a second bond pad on a second die surface, the second semiconductor die bonded to the second surface of the coreless signal distribution structure via the second bond pad;
a metal post electrically coupled to the first surface of the coreless signal distribution structure; and
a first encapsulant material encapsulating side surfaces and a surface opposite the first die surface of the first semiconductor die, the metal post, and a portion of the first surface of the coreless signal distribution structure.
2. The semiconductor device according to claim 1 , wherein the metal post comprises copper and extends through the encapsulant material.
3. The semiconductor device according to claim 1 , comprising a second encapsulant material encapsulating the second semiconductor die.
4. The semiconductor device according to claim 3 , comprising a second metal post coupled to the coreless signal distribution structure and extending through the second encapsulant material.
5. The semiconductor device according to claim 3 , wherein a surface of the second encapsulant is coplanar with a surface of the second semiconductor die opposite the second die surface.
6. The semiconductor device according to claim 1 , wherein a conductive pillar electrically couples the first bond pad of the first semiconductor die to the coreless signal distribution structure.
7. The semiconductor device according to claim 1 , comprising a redistribution structure on the first encapsulant and electrically coupled to the metal post, wherein the redistribution structure comprises at least one conductive layer and at least one dielectric layer.
8. The semiconductor device according to claim 1 , wherein the coreless signal distribution structure has a linewidth of 1-10 μm.
9. A semiconductor device comprising:
a coreless signal distribution structure comprising at least one dielectric layer, at least one conductive layer, a first surface, and a second surface opposite to the first surface;
a first semiconductor die having a first bond pad on a first die surface, the first semiconductor die bonded to the first surface of the coreless signal distribution structure via the first bond pad;
a second semiconductor die having a second bond pad on a second die surface, the second semiconductor die bonded to the second surface of the coreless signal distribution structure via the second bond pad;
a first encapsulant material encapsulating side surfaces of the first semiconductor die and a portion of the first surface of the coreless signal distribution structure; and
a redistribution structure on the first encapsulant, wherein the redistribution structure comprises at least one conductive layer and at least one dielectric layer.
10. The semiconductor device of claim 9 , comprising a first metal post on the coreless signal distribution structure adjacent to a first edge of the first semiconductor die, the first metal post extending through the encapsulant material.
11. The semiconductor device of claim 10 , comprising a second metal post on the coreless signal distribution structure adjacent to a second edge of the first semiconductor die, the second metal post extending through the encapsulant material.
12. The semiconductor device of claim 11 , wherein the redistribution structure is electrically coupled to the first metal post and an interconnection structure on the first encapsulant.
13. The semiconductor device of claim 12 , wherein a dielectric layer of the redistribution structure contacts the first metal post and the interconnection structure but not the second metal post.
14. The semiconductor device of claim 12 , wherein the interconnection structure comprises a conductive bump.
15. The semiconductor device of claim 9 , comprising encapsulating the second semiconductor die utilizing a second encapsulant material.
16. The semiconductor device of claim 11 , wherein a second encapsulant encapsulates the second semiconductor die and is coplanar with a surface of the second semiconductor die opposite the second die surface.