Spin-transfer torque magnetic random access memory with perpendicular magnetic anisotropy multilayers
View Patent ↗The present invention is directed to a spin transfer torque magnetic random access memory (STTMRAM) element comprising a composite free layer including one or more stacks of a bilayer unit that comprises an insulator layer and a magnetic layer with the magnetic layer having a variable magnetization direction substantially perpendicular to a layer plane thereof; a magnetic pinned layer having a first fixed magnetization direction substantially perpendicular to a layer plane thereof; a tunnel barrier layer formed between the composite free layer and the magnetic pinned layer; and a magnetic fixed layer coupled to the magnetic pinned layer through an anti-ferromagnetic coupling layer. The magnetic fixed layer has a second fixed magnetization direction that is substantially perpendicular to a layer plane thereof and is substantially opposite to the first fixed magnetization direction.
1. A spin transfer torque magnetic random access memory (STTMRAM) element comprising:
a composite free layer including one or more stacks of a bilayer unit that comprises an insulator layer and a magnetic layer, said magnetic layer having a variable magnetization direction substantially perpendicular to a layer plane thereof,
a magnetic pinned layer having a first fixed magnetization direction substantially perpendicular to a layer plane thereof;
a non-magnetic tunnel barrier layer formed between said composite free layer and said magnetic pinned layer; and
a magnetic fixed layer coupled to said magnetic pinned layer through an anti-ferromagnetic coupling layer, said magnetic fixed layer having a second fixed magnetization direction that is substantially perpendicular to a layer plane thereof and is substantially opposite to said first fixed magnetization direction.
2. The STTMRAM element of claim 1 , wherein said anti-ferromagnetic coupling layer is made of ruthenium.
3. The STTMRAM element of claim 1 , wherein said non-magnetic tunnel barrier is made of magnesium oxide.
4. The STTMRAM element of claim 1 , wherein said insulator layer of said bilayer unit is made of a magnesium oxide compound, said magnetic layer of said bilayer unit comprises cobalt and iron.
5. The STTMRAM element of claim 1 , wherein said insulator layer of said bilayer unit is made of an insulator material selected from the group consisting of aluminum oxide, zinc oxide, titanium oxide, strontium oxide, ruthenium oxide, silicon oxide, zirconium oxide, hafnium oxide, tantalum oxide, silicon nitride, and any combinations thereof.
6. The STTMRAM element of claim 1 , wherein said magnetic layer of said bilayer unit further comprises first and second magnetic sublayers separated by a boron absorption layer, said first and second magnetic sublayers having said variable magnetization direction substantially perpendicular to layer planes thereof.
7. The STTMRAM element of claim 6 , wherein said boron absorption layer is made of a material selected from the group consisting of Ta, Ti, Ru, and any combinations thereof.
8. The STTMRAM element of claim 6 , wherein said boron absorption layer is made of a material selected from the group consisting of Ta, Ti, Ru, Co, Fe, Ni, and any combinations thereof.
9. The STTMRAM element of claim 6 , wherein at least one of said first and second magnetic sublayers is made of a CoFeB or CoFe alloy.
10. The STTMRAM element of claim 1 , wherein said magnetic pinned layer comprises iron and cobalt.
11. The STTMRAM element of claim 1 , wherein said magnetic pinned layer further comprises first and second magnetic sublayers separated by a boron absorption layer, said first and second magnetic sublayers having said first fixed magnetization direction substantially perpendicular to layer planes thereof.
12. The STTMRAM element of claim 11 , wherein said boron absorption layer is made of a material selected from the group consisting of Ta, Ti, Ru, and any combinations thereof.
13. The STTMRAM element of claim 11 , wherein said boron absorption layer is made of a material selected from the group consisting of Ta, Ti, Ru, Co, Fe, Ni, and any combinations thereof.
14. The STTMRAM element of claim 11 , wherein at least one of said first and second magnetic sublayers is made of a CoFeB or CoFe alloy.
15. The STTMRAM element of claim 1 , further comprising a magnetic insertion layer formed between said composite free layer and said tunnel barrier layer.
16. The STTMRAM element of claim 15 , wherein said magnetic insertion layer comprises iron.
17. The STTMRAM element of claim 15 , wherein said magnetic insertion layer is made of a magnetic metal or alloy selected from the group consisting of Co, Fe, CoFe, B, Ta, Ti, Hf, Cr, and any combinations thereof.
18. The STTMRAM element of claim 1 , further comprising a magnetic insertion layer formed between said magnetic pinned layer and said tunnel barrier layer.
19. The STTMRAM element of claim 18 , wherein said magnetic insertion layer comprises iron.
20. The STTMRAM element of claim 18 , wherein said magnetic insertion layer is made of a magnetic metal or alloy selected from the group consisting of Co, Fe, CoFe, B, Ta, Ti, Hf, Cr, and any combinations thereof.