IP Library Granted Patent US 9,613,829
Granted Patent B1
US 9,613,829 · App. 15/148,895 · Granted Apr 4, 2017

Method for fabricating semiconductor package and semiconductor package using the same

Inventors: Seung Woo Lee (Seoul, KR); Byong Jin Kim (Bucheon-si, KR); Won Bae Bang (Seongnam-si, KR); Sang Goo Kang (Seoul, KR)
Assignee: AMKOR TECHNOLOGY, INC.
H01L21/4839H01L21/486H01L21/4825H01L21/4828H01L21/565H01L23/3157H01L23/4952H01L23/49537H01L23/49558H01L23/5226
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Quick Facts
Patent No.
US 9,613,829
App. No.
15/148,895
Granted
Apr 4, 2017
Kind
B1
Abstract

Provided are a method for fabricating a semiconductor package and a semiconductor package using the same, which can simplify a fabricating process of the semiconductor package by forming a lead frame on which a semiconductor die can be mounted without a separate grinding process, and can improve product reliability by preventing warpage from occurring during a grinding process. In one embodiment, the method for fabricating a semiconductor package includes forming a frame on a carrier, forming a first pattern layer on the frame, first encapsulating the frame and the first pattern layer using a first encapsulant, forming conductive vias electrically connected to the first pattern layer while passing through the first encapsulant, forming a second pattern layer electrically connected to the conductive vias on the first encapsulant, forming a first solder mask formed on the first encapsulant and exposing a portion of the second pattern layer to the outside, removing the frame by an etching process and etching a portion of the first pattern layer, and attaching a semiconductor die to the first pattern layer.

Claims (85)

1. A method for fabricating a semiconductor package, the method comprising:

forming a first leadframe pattern;

encapsulating the first leadframe pattern with an encapsulant defining:

an encapsulant first surface adjacent the first leadframe pattern; and

an encapsulant second surface opposite the encapsulant first surface;

forming a conductive via extending from the encapsulant second surface to the first leadframe pattern;

forming a second leadframe pattern on the encapsulant second surface, the second leadframe pattern coupled to the first leadframe pattern through the conductive via;

etching part of the first leadframe pattern to form an etched first leadframe surface configured to receive an interconnect to a semiconductor die; and

one or both of:

forming a first solder mask on the encapsulant second surface and exposing a portion of the second leadframe pattern; and/or

forming a second solder mask on the encapsulant first surface and exposing a portion of the etched first leadframe surface.

2. The method of claim 1 , wherein:

the conductive via comprises a laser-drilled throughhole filed with conductive material.

3. The method of claim 1 , wherein:

the second leadframe pattern is formed concurrently with the conductive via.

4. The method of claim 1 , further comprising:

attaching the semiconductor die to the etched first leadframe surface through the interconnect;

wherein the interconnect comprises one or both of:

a metallic pillar; and/or

a solder.

5. The method of claim 4 , further comprising:

providing a molding encapsulant over the encapsulant first surface and around the semiconductor die.

6. The method of claim 5 , wherein:

the molding encapsulant encapsulates the interconnect between the semiconductor die and the etched first leadframe surface.

7. The method of claim 1 , wherein:

the encapsulant first surface protrudes past the etched first leadframe surface.

8. The method of claim 1 , wherein:

said forming a first leadframe pattern comprises:

forming the first leadframe pattern on a metallic frame supported by a carrier; and

said etching the first leadframe pattern comprises:

removing the carrier and the metallic frame to expose the first leadframe pattern for etching.

9. The method of claim 1 , comprising:

forming the second solder mask;

wherein the encapsulant is a molding compound.

10. A semiconductor package comprising:

a substrate comprising:

a first encapsulant;

a first leadframe pattern embedded into a top surface of the first encapsulant;

a second leadframe pattern protruding below a bottom surface of the first encapsulant; and

a conductive via connecting the first leadframe pattern to the second leadframe pattern;

a semiconductor die mounted on the substrate and electrically connected to the first leadframe pattern;

a second encapsulant over the first encapsulant and around the semiconductor die; and

a first solder mask under the substrate and exposing a portion of the second leadframe pattern;

wherein:

the first encapsulant comprises a first mold compound layer;

the second encapsulant comprises a second mold compound layer;

a thickness of the conductive via decreases from the second leadframe pattern to the first leadframe pattern;

the semiconductor die is coupled to the first leadframe pattern by conductive bumps; and

the second encapsulant encapsulates the conductive bumps between the semiconductor die and the first leadframe pattern.

11. The semiconductor package of claim 10 , comprising:

a second solder mask over the substrate and exposing a portion of the first leadframe pattern for coupling with the semiconductor die;

wherein:

the conductive via comprises a laser drilled via filled with conductive material; and

the first encapsulant protrudes past a top surface of the first leadframe pattern.

12. A semiconductor package comprising:

a substrate comprising:

a non-laminate first encapsulant;

a first leadframe pattern embedded in the first encapsulant;

a second leadframe pattern on the first encapsulant; and

a conductive via electrically connecting the first leadframe pattern to the second leadframe pattern;

a semiconductor die mounted on the substrate and electrically connected to the first leadframe pattern; and

one or both of:

a first solder mask under the substrate and exposing a portion of the second leadframe pattern; and/or

a second solder mask over the substrate and exposing a portion of the first leadframe pattern for coupling with the semiconductor die.

13. The semiconductor package of claim 12 , comprising:

the first solder mask.

14. The semiconductor package of claim 12 , comprising:

the second solder mask.

15. The semiconductor package of claim 12 , comprising:

the first and second solder masks.

16. The semiconductor package of claim 12 , wherein:

the first encapsulant comprises a molding compound; and

the conductive via comprises a laser drilled via filled with conductive material.

17. The semiconductor package of claim 12 , wherein:

a thickness of the conductive via decreases from the second leadframe pattern to the first leadframe pattern.

18. The semiconductor package of claim 12 , further comprising:

a second encapsulant over the first encapsulant and around the semiconductor die;

wherein:

the first encapsulant comprises a first mold compound layer; and

the second encapsulant comprises a second mold compound layer.

19. The semiconductor package of claim 18 , further comprising:

conductive bumps coupling the semiconductor die to the first leadframe pattern;

wherein the second encapsulant encapsulates the conductive bumps between the semiconductor die and the first leadframe pattern.

20. The semiconductor package of claim 12 , further comprising:

the first encapsulant protrudes past a top surface of the first leadframe pattern.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 12, 2020
From: AMKOR TECHNOLOGY, INC.
To: AMKOR TECHNOLOGY SINGAPORE HOLDING PTE.LTD.
Reel/Frame 054046/0673 →
SECURITY INTEREST Recorded Aug 1, 2018
From: AMKOR TECHNOLOGY, INC.
To: BANK OF AMERICA, N.A., AS AGENT
Reel/Frame 046683/0139 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 15, 2016
From: LEE, SEUNG WOO; KIM, BYONG JIN; BANG, WON BAE; KANG, SANG GOO
To: AMKOR TECHNOLOGY, INC.
Reel/Frame 039435/0145 →
Priority Claims (1)
KR 10-2015-0174092 · Dec 8, 2015 · national