IP Library Granted Patent US 9,786,334
Granted Patent B2
US 9,786,334 · App. 15/164,400 · Granted Oct 10, 2017

Interconnections for 3D memory

Inventor: Toru Tanzawa (Tokyo, JP)
Assignee: Micron Technology, Inc.
G11C5/063G11C5/02G11C5/06G11C7/12G11C7/222G11C16/10G11C16/26H01L27/11524H01L27/11529H01L27/11551G11C16/0483G11C16/08G11C16/16
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Quick Facts
Patent No.
US 9,786,334
App. No.
15/164,400
Granted
Oct 10, 2017
Kind
B2
Abstract

Apparatuses and methods for interconnections for 3D memory are provided. One example apparatus can include a stack of materials including a plurality of pairs of materials, each pair of materials including a conductive line formed over an insulation material. The stack of materials has a stair step structure formed at one edge extending in a first direction. Each stair step includes one of the pairs of materials. A first interconnection is coupled to the conductive line of a stair step, the first interconnection extending in a second direction substantially perpendicular to a first surface of the stair step.

Claims (33)

1. A method, comprising:

performing a read operation on a three dimensional memory array including a string of memory cells and access lines coupled to the string and comprising:

disabling an equalization circuit coupled to the access lines and the string;

providing a first voltage level to a selected one of the access lines,

providing a second voltage level to a non-selected one of the access lines, the second voltage level being higher than the first voltage level;

after performing the read operation:

providing a third voltage level to the selected one of the access lines, wherein the first and third voltage levels are different from each other, and the third voltage level is higher than a ground reference potential; and

enabling the equalization circuit such that the selected one of the access lines is coupled to the non-selected one of the access lines.

2. The method of claim 1 , comprising:

after performing the read operation, providing a fourth voltage level to the non-selected one of the access lines, wherein the third and fourth voltage levels are substantially equal to each other.

3. The method of claim 2 , comprising:

after providing the third voltage to the selected one of the access lines and the fourth voltage level to the non-selected one of the access lines, discharging the selected one of the access lines and the non-selected one of the access lines to the ground reference potential.

4. The method of claim 2 , comprising:

after performing the read operation, providing a fourth voltage level to the non-selected one of the access lines, wherein the third and fourth voltage levels are not equal to each other.

5. The method of claim 2 , comprising:

after performing the read operation, controlling the selected one of the access lines and the non-selected one of the access lines to be substantially equal to the ground reference potential.

6. The method of claim 2 , comprising:

discharging the selected one the access lines to the ground reference potential after providing the third voltage level to the selected one of the access lines.

7. An apparatus comprising:

a three dimensional memory comprising access lines coupled to memory cells and an equalization circuit, the access lines comprising a first access line configured to be a selected access line in a read operation and a second access line configured to be a non-selected access line in the read operation, wherein, upon completion of the read operation, the equalization circuit is enabled to couple the first access line to the second access line such that the first and second access lines are, after the read operation is completed, substantially equal in a voltage level to each other, the voltage level being different from a ground reference potential.

8. The apparatus of claim 7 , wherein the three dimensional memory comprises a stair step structure comprising the access lines.

9. The apparatus of claim 7 , wherein the first and second access lines are configured to be discharged to the ground reference potential after the first and second access lines are configured to be substantially equal in the voltage level to each other.

10. The apparatus of claim 9 , wherein the first and second access lines are configured to have, after being discharged to the ground reference potential, a non-negative potential.

11. The apparatus of claim 7 , comprising:

a first string driver coupled to a corresponding one of the access lines to drive the corresponding one of the access lines.

12. The apparatus of claim 11 , wherein the three dimensional memory array comprises a drain select gate and a source select gate and the apparatus comprises:

a second string driver coupled to the drain select gate to drive the drain select gate; and

a third string driver coupled to the source select gate to drive the select gate.

13. The apparatus of claim 7 , comprising:

a controller configured to control the read operation of the three dimensional memory.

14. The apparatus of claim 7 , comprising:

a host; and

an interface configured to communicate data used in the read operation with the host.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050676/0782 →
RELEASE OF SECURITY INTEREST Recorded Jul 20, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046635/0634 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 1 TO PATENT SECURITY AGREEMENT Recorded Aug 26, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 039841/0207 →
SUPPLEMENT NO. 1 TO PATENT SECURITY AGREEMENT Recorded Aug 25, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 039824/0681 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 25, 2016
From: TANZAWA, TORU
To: MICRON TECHNOLOGY, INC.
Reel/Frame 038719/0284 →
Continuity (3)
Continuation 14813711 · Jul 30, 2015
Division 13774522 · Feb 22, 2013
Related Publication 20160267948A1 · Sep 15, 2016