III-V compound and Germanium compound nanowire suspension with Germanium-containing release layer
A device that includes: a substrate layer; a first set of source/drain component(s) defining an nFET (n-type field-effect transistor) region; a second set of source/drain component(s) defining a pFET (p-type field-effect transistor) region; a first suspended nanowire, at least partially suspended over the substrate layer in the nFET region and made from III-V material; and a second suspended nanowire, at least partially suspended over the substrate layer in the pFET region and made from Germanium-containing material. In some embodiments, the first suspended nanowire and the second suspended nanowire are fabricated by adding appropriate nanowire layers on top of a Germanium-containing release layer, and then removing the Germanium-containing release layers so that the nanowires are suspended.
1. A semiconductor device comprising:
a substrate layer;
a first set of source/drain component(s) defining an nFET (n-type field-effect transistor) region in the substrate layer;
a second set of source/drain component(s) defining a pFET (p-type field-effect transistor) region in the substrate layer;
a first suspended nanowire, at least partially suspended over the substrate layer in the nFET region, made from III-V material, and electrically connected to act as a gate for the first set of source/drain component(s); and
a second suspended nanowire, at least partially suspended over the substrate layer in the pFET region, made from Silicon-Germanium (SiGe), and electrically connected to act as a gate for the second set of source/drain component(s).