Heat treatment apparatus emitting flash of light
Flash lamps connected to short-pulse circuits and flash lamps connected to long-pulse circuits are alternately arranged in a line. The duration of light emission from the flash lamps connected to the long-pulse circuits is longer than the duration of light emission from the flash lamps connected to the short-pulse circuits. A superimposing of a flash of light with a high peak intensity from the flash lamps that emit light for a short time and a flash of light with a gentle peak from the flash lamps that emit light for a long time can increase the temperature of even a deep portion of a substrate to an activation temperature or more without heating a shallow portion near the substrate surface more than necessary. This achieves the activation of deep junctions without causing substrate warpage or cracking.
1. A method for irradiating a substrate with flashes of light to heat the substrate, the method comprising:
(a) a first irradiation step of irradiating the substrate with a flash of light from a first flash lamp, to increase a surface temperature of the substrate to a predetermined temperature or more, the flash of light having a first peak intensity; and
(b) a second irradiation step of irradiating the substrate with a flash of light from a second flash lamp, to maintain the surface temperature of the substrate at the predetermined temperature or more, the flash of light having a second peak intensity lower than the first peak intensity.
2. The method according to claim 1 , wherein the flash of light having the first peak intensity has a pulse width shorter than a pulse width of the flash of light having the second peak intensity.
3. The method according to claim 1 , wherein the substrate is heated to produce a metal silicide.