Method of manufacturing a semiconductor package
Methods for a semiconductor device package formed in a chip-on-wafer last process using thin film adhesives are disclosed and may include bonding a first carrier to a first surface of an interposer in wafer form, forming conductive bumps on a second surface of the interposer, bonding a second carrier to the conductive bumps utilizing a film adhesive, removing the first carrier from the interposer, bonding a semiconductor die to the first surface of the interposer, and encapsulating the die and the first surface of the interposer in an encapsulant material. The second carrier and the film adhesive may be removed from the conductive bumps utilizing a slide-off process. The interposer and encapsulant may be diced into a plurality of interposer and die structures. One of the die and interposer structures may be bonded to a substrate. The die may be bonded to the interposer utilizing a mass reflow process.
1. A method of manufacturing a semiconductor package, the method comprising:
receiving an interposer on a support structure, the interposer comprising an interposer back side that comprises a plurality of interposer back side interconnection structures;
attaching a back side carrier to the interposer back side;
removing the support structure from the interposer;
attaching a semiconductor die to a front side of the interposer;
encapsulating at least a portion of the interposer and at least a portion of the semiconductor die in an encapsulating material; and
attaching a front side carrier to the encapsulating material and removing the back side carrier.
2. The method of claim 1 , wherein said attaching the back side carrier to the interposer back side comprises utilizing an adhesive layer to bond the back side carrier to the interposer back side.
3. The method of claim 2 , wherein each of the interposer back side interconnection structures comprises an under-bump metal that is at least partially embedded in the adhesive layer.
4. The method of claim 1 , wherein said removing the support structure from the interposer comprises separating the support structure from the interposer.
5. The method of claim 1 , comprising forming conductive columns electrically connected to the front side of the interposer and at least as tall as the thickness of the interposer.
6. The method of claim 5 , comprising grinding the conductive columns.
7. The method of claim 1 , comprising, before said encapsulating, underfilling between the semiconductor dies and the interposer.
8. The method of claim 1 , wherein said encapsulating comprises encapsulating a top side of the semiconductor die.
9. The method of claim 8 , wherein said encapsulating comprises grinding a top side of the encapsulating material without exposing a top side of the semiconductor die.
10. The method of claim 1 , comprising after said encapsulating, singulating the interposer from a wafer comprising the interposer and at least another interposer.
11. A method of manufacturing a semiconductor packaging, the method comprising:
receiving an interposer on a support structure, the interposer comprising an interposer back side that comprises a plurality of interposer back side interconnection structures;
attaching a back side carrier to the interposer back side;
removing the support structure from the interposer;
forming interposer front side interconnection structures on a front side of the interposer;
attaching a plurality of semiconductor dies to the interposer front side interconnection structures;
encapsulating at least the front side of the interposer and lateral sides of the semiconductor dies in an encapsulating material;
removing the back side carrier; and
forming conductive balls on the interposer back side interconnection structures.
12. The method of claim 11 , wherein said interposer on a support structure comprises an intervening layer between the interposer and the support structure.
13. The method of claim 12 , wherein the intervening layer comprises an adhesive layer.
14. The method of claim 12 , comprising after said attaching the back side carrier to the interposer back side, removing both the support structure and the intervening layer from the interposer.
15. A method of manufacturing a semiconductor package, the method comprising:
receiving an interposer on a support structure, the interposer comprising an interposer front side that comprises a plurality of interposer front side interconnection structures;
attaching a first front side carrier to the interposer front side;
removing the support structure from the interposer;
forming interposer back side interconnection structures on a back side of the interposer;
attaching a back side carrier to the interposer back side and removing the first front side carrier from the interposer front side;
attaching a plurality of semiconductor dies to the interposer front side interconnection structures; and
encapsulating at least the front side of the interposer and lateral sides of the semiconductor dies in an encapsulating material.
16. The method of claim 15 , comprising after said encapsulating, forming conductive balls on a bottom side of the package.
17. The method of claim 15 , comprising after said encapsulating, singulating the interposer from a wafer comprising the interposer and at least another interposer.
18. The method of claim 15 , comprising prior to said encapsulating, forming an underfill between the attached plurality of semiconductor dies and the interposer.
19. The method of claim 15 , wherein said removing the support structure from the interposer comprises thinning the support structure.
20. The method of claim 19 , wherein the support structure comprises silicon, and said thinning the support structure comprises grinding the support structure from the interposer to expose the interposer back side.