Semiconductor device and manufacturing method thereof
The reliability of wirings, each of which includes a main conductive film containing copper as a primary component, is improved. On an insulating film including the upper surface of a wiring serving as a lower layer wiring, an insulating film formed of a silicon carbonitride film having excellent barrier properties to copper is formed; on the insulating film, an insulating film formed of a silicon carbide film having excellent adhesiveness to a low dielectric constant material film is formed; on the insulating film, an insulating film formed of a low dielectric constant material as an interlayer insulating film is formed; and thereafter a wiring as an upper layer wiring is formed.
1. A semiconductor integrated circuit device comprising:
a first insulating film formed over a semiconductor substrate;
a first wiring trench formed in the first insulating film;
a first metal film filled in the first wiring trench;
a second insulating film formed over the first metal film and the first insulating film;
a third insulating film formed over the second insulating film;
a contact hole formed in the third and second insulating films;
a second wiring trench formed in the third insulating film; and
a second metal film filled in the second wiring trench and the contact hole as one combined unit, such that the second metal film is connected to the first metal film,
wherein the first and second metal films include copper as a primary component,
wherein each of the first and third insulating films has a greater thickness than the second insulating film, has a lower dielectric constant than a dielectric constant of a silicon oxide film and is comprised of a material including silicon, oxygen and carbon,
wherein the second insulating film is formed of a different material form the first and third insulating films and is comprised of a material including silicon, nitrogen and carbon, and
wherein a nitrogen concentration in the second insulating film disposed near the first metal film is larger than a nitrogen concentration in the second insulating film disposed near the third insulating film.
2. A semiconductor integrated circuit device according to the claim 1 ,
wherein a first conductive barrier film is formed between the first metal film and the first insulating film and is formed of a different material form the first metal film.
3. A semiconductor integrated circuit device according to the claim 2 ,
wherein a copper nitride layer is formed on an upper surface of the first metal film.
4. A semiconductor integrated circuit device according to the claim 3 ,
wherein a second conductive barrier film is formed between the second metal film and the third insulating film, is formed between the second metal film and the first metal film, and is formed of a different material than the second metal film.