Semiconductor devices comprising nitrogen-doped gate dielectric
Some embodiments include semiconductor devices having first transistors of a first channel type and having second transistors of a second channel type. The first transistors include a first gate electrode, a first nitrogen-doped gate dielectric layer and a first high-k material. The second transistors include a second gate electrode, a second nitrogen-doped gate dielectric layer and a second high-k material. The second nitrogen-doped gate dielectric layer is doped with nitrogen to a different peak concentration than the first nitrogen-doped gate dielectric layer. Some embodiments include methods of forming PMOS and NMOS transistors having nitrogen-doped gate dielectric material.
1. A semiconductor device comprising:
a PMOS transistor having a first nitrogen-doped gate dielectric layer doped with nitrogen to a first concentration;
an NMOS transistor having a second nitrogen-doped gate dielectric layer doped with nitrogen to a second concentration; wherein the second concentration is at least about 30% greater than the first concentration;
wherein the first and second nitrogen-doped gate dielectric layers both comprise silicon oxide; and
wherein the PMOS transistor comprises a first oxide and a second oxide over the first nitrogen-doped gate dielectric layer, and comprises a metal-containing composition over the second oxide; and wherein the NMOS transistor comprises the same metal-containing composition as the PMOS transistor, and comprises only first oxide between the metal-containing composition and the second nitrogen-doped gate dielectric layer.
2. The semiconductor device according to claim 1 , wherein the metal-containing composition is a metal nitride, the first oxide is hafnium oxide and the second oxide is aluminum oxide.