Nanosheet field effect transistors with partial inside spacers
View Patent ↗A method of forming a nanosheet device, including forming a channel stack on a substrate, where the channel stack includes at least one nanosheet channel layer and at least one sacrificial release layer, forming a stack cover layer on at least a portion of the channel stack, forming a dummy gate on at least a portion of the stack cover layer, wherein at least a portion of the at least one nanosheet channel layer and at least one sacrificial release layer is exposed on opposite sides of the dummy gate, removing at least a portion of the at least one sacrificial release layer on each side of the dummy gate to form a sacrificial supporting rib, and forming an inner spacer layer on exposed portions of the at least one nanosheet channel layer and at least one sacrificial supporting rib.
1. A method of forming a nanosheet device, comprising:
forming a channel stack on a substrate, where the channel stack includes at least one nanosheet channel layer and at least one sacrificial release layer;
forming a stack cover layer on at least a portion of the channel stack, wherein the stack cover layer is formed on at least a portion of exposed sides of the at least one nanosheet channel layer and the at least one sacrificial release layer;
forming a dummy gate on at least a portion of the stack cover layer, wherein at least a portion of the at least one nanosheet channel layer and at least one sacrificial release layer is exposed on opposite sides of the dummy gate;
removing at least a portion of the at least one sacrificial release layer on each side of the dummy gate to form a sacrificial supporting rib; and
forming an inner spacer layer on exposed portions of the at least one nanosheet channel layer and at least one sacrificial supporting rib.
2. The method of claim 1 , wherein the one or more nanosheet channel layer(s) are silicon, and the sacrificial supporting rib includes a wider portion under the dummy gate.
3. The method of claim 1 , further comprising removing a portion of the inner spacer layer, at least one nanosheet channel layer, and at least one sacrificial supporting rib from the opposite sides of the dummy gate, wherein removing the portion of the inner spacer layer leaves a rectangular cavity fill at each corner of the at least one nanosheet channel layer; and forming a source/drain region on opposite sides of the dummy gate.
4. The method of claim 3 , wherein the source/drain region is epitaxially grown on a continuous sidewall formed by the at least one nanosheet channel layer and at least one sacrificial supporting rib.
5. The method of claim 3 , further comprising removing the dummy gate; and removing at least a portion of the at least one sacrificial supporting rib.
6. The method of claim 5 , further comprising forming a gate structure on the at least one nanosheet channel layer.
7. The method of claim 6 , wherein the gate structure includes a gate dielectric layer wrapped around the at least one nanosheet channel layer.
8. The method of claim 6 , wherein the gate structure includes a work function layer wrapped around the at least one nanosheet channel layer.
9. A method of forming a nanosheet device, comprising:
forming a channel stack on a substrate, where the channel stack includes at least one nanosheet channel layer and at least one sacrificial release layer;
forming a stack cover layer on at least a portion of the channel stack, wherein the stack cover layer is formed on at least a portion of exposed sides of the at least one nanosheet channel layer and the at least one sacrificial release layer;
forming a dummy gate on at least a portion of the stack cover layer, wherein at least a portion of the at least one nanosheet channel layer and at least one sacrificial release layer is exposed on opposite sides of the dummy gate;
removing at least a portion of the at least one sacrificial release layer on each side of the dummy gate to form a sacrificial supporting rib;
forming an inner spacer layer on exposed portions of the at least one nanosheet channel layer and at least one sacrificial supporting rib; and
removing the inner spacer layer, at least one nanosheet channel layer, and at least one sacrificial supporting rib from the opposite sides of the dummy gate to expose a portion of the substrate, wherein cavity fills remain under the dummy gate.
10. The method of claim 9 , further comprising forming a source/drain region on opposite sides of the dummy gate, wherein the source/drain regions are epitaxially grown on a continuous sidewall formed by the at least one nanosheet channel layer and at least one sacrificial supporting rib.
11. The method of claim 9 , wherein removing the inner spacer layer, at least one nanosheet channel layer, and at least one sacrificial supporting rib from the opposite sides of the dummy gate, exposes the cavity fills and end faces of the at least one nanosheet channel layer.
12. The method of claim 11 , further comprising removing the dummy gate, wherein removing the dummy gate forms an opening that exposes the at least one nanosheet channel layer and at least one sacrificial supporting rib.
13. The method of claim 12 , further comprising removing the at least one sacrificial supporting rib, and forming a gate dielectric layer wrapped around the at least one nanosheet channel layer.
14. The method of claim 13 , wherein the gate dielectric layer is formed by atomic layer deposition (ALD).