Semiconductor structures having low resistance paths throughout a wafer
A semiconductor structure with low resistance conduction paths and methods of manufacture are disclosed. The method includes forming at least one low resistance conduction path on a wafer, and forming an electroplated seed layer in direct contact with the low resistance conduction path.
1. A method, comprising:
forming a silicide layer on a substrate;
forming a low resistance conduction path in a dicing channel in an interlevel dielectric layer above the silicide layer;
forming an active device on the substrate and in contact with the silicide layer;
forming a second interlevel dielectric layer over the interlevel dielectric layer;
patterning the second interlevel dielectric layer to form a first opening exposing the low resistance conduction path and a second opening above the active device;
forming a barrier layer on sidewalls and bottoms of the first and second openings and in contact with the low resistance conduction path; and
forming a seed layer in contact with the barrier layer, wherein:
the low resistance conduction path comprises a plurality of vias,
the first opening is formed in the dicing channel on a side of the active device to expose all of the plurality of vias so that the barrier layer is formed in direct contact with material of the plurality of vias, and
the forming the low resistance conduction path comprises etching the plurality of vias into the interlevel dielectric layer to the silicide layer and filling the plurality of vias with metal material to form metal contacts in direct contact with the silicide layer.
2. The method of claim 1 , wherein the low resistance conduction path is provided into the interlevel dielectric material and contacts the silicide layer.
3. The method of claim 1 , wherein the silicide layer is formed at a junction between the interlevel dielectric material and the underlying substrate.
4. The method of claim 1 , wherein the silicide layer is formed by reaction of a thin metal film with silicon through an annealing process.
5. The method of claim 1 , wherein the low resistance conduction path is part of a crackstop guard ring.
6. The method of claim 1 , wherein the second interlevel dielectric layer is formed directly on the interlevel dielectric layer.
7. The method of claim 6 , further comprising an electroplating process to form a metal layer on the seed layer.
8. The method of claim 7 , wherein the vias of the plurality of vias are formed at one side of the active device.
9. A method, comprising:
forming a silicide layer on a substrate;
forming an active device on the substrate and in contact with the silicide layer;
forming a low resistance conduction path remote from the active device in an interlevel dielectric layer above the silicide layer;
forming a second interlevel dielectric layer over the interlevel dielectric layer;
patterning the second interlevel dielectric layer to form a first opening exposing the low resistance conduction path;
forming a barrier layer on sidewalls and a bottom of the first opening in contact with the low resistance conduction path; and
forming a seed layer in contact with the barrier layer, wherein:
the low resistance conduction path comprises a plurality of parallel vias,
the first opening is formed in a dicing channel on a side of the active device to expose all of the plurality of parallel vias so that the barrier layer is formed in direct contact with material of the plurality of parallel vias, and
the forming the low resistance conduction path comprises etching the plurality of parallel vias into the interlevel dielectric layer to the silicide layer and filling the plurality of parallel vias with metal material to form metal contacts in direct contact with the silicide layer.
10. The method of claim 9 , further comprising patterning the second interlevel dielectric layer to form a second opening above the active device.
11. The method of claim 10 , further comprising forming the barrier layer on sidewalls and a bottom of the second opening.
12. The method of claim 11 , wherein the second interlevel dielectric layer is formed directly on the interlevel dielectric layer.
13. The method of claim 12 , wherein the low resistance conduction path is formed at one side of the active device.