Forming insulator fin structure in isolation region to support gate structures
A method for forming the semiconductor device that includes forming a plurality of composite fin structures across a semiconductor substrate including an active device region and an isolation region. The composite fin structures may include a semiconductor portion over the active device region and a dielectric portion over the isolation region. A gate structure can be formed on the channel region of the fin structures that are present on the active regions of the substrate, and the gate structure is also formed on the dielectric fin structures on the isolation regions of the substrate. Epitaxial source and drain regions are formed on source and drain portions of the fin structures present on the active region, wherein the dielectric fin structures support the gate structure over the isolation regions.
1. A semiconductor device comprising:
a composite fin structure including semiconductor fin portions on an active device region of a semiconductor substrate and dielectric fin portions on isolation regions of the semiconductor substrate, wherein the semiconductor fin portions are in direct contact with the dielectric fin portions and the semiconductor fin portions and the dielectric fin portions have a same height, wherein the semiconductor fin portions and the dielectric fin portions have a same width, the dielectric fin portions being present entirely filling fin trenches that are present in the isolation regions;
a gate structure present on a channel region portion of the composite fin structure; and
epitaxial source and drain regions on the source and drain region portions of the composite fin structure.
2. The semiconductor device of claim 1 , wherein the semiconductor fin portions of the composite fin structure have a same width as the dielectric fin portions of the composite fin structure.
3. The semiconductor device of claim 1 , wherein the semiconductor fin portions are comprised of a semiconductor material selected from the group consisting of silicon (Si), germanium (Ge), silicon germanium (SiGe), silicon doped with carbon (Si:C), type III-V semiconductors and combinations thereof.
4. The semiconductor device of claim 1 , wherein the dielectric fin portions are comprised of a dielectric selected from the group consisting of silicon oxide, silicon oxynitride, aluminum oxide, hafnium oxide, silicon boron carbon nitride, and combinations thereof.
5. The semiconductor device of claim 1 , wherein the epitaxial source and drain regions are merged source and drain regions extending into contact with the source and drain fin portions of adjacent fin structures.
6. The semiconductor device of claim 1 , wherein the epitaxial source and drain regions are comprised a semiconductor material selected from the group consisting of silicon (Si), germanium (Ge), silicon germanium (SiGe), silicon doped with carbon (Si:C), type III-V semiconductors and combinations thereof.
7. The semiconductor device of claim 1 , wherein the semiconductor device is an n-type fin field effect transistor.
8. The semiconductor device of claim 1 , wherein the semiconductor device is a p-type fin field effect transistor.
9. A semiconductor device comprising:
a composite fin structure including semiconductor fin portions on an active device region of a semiconductor substrate and dielectric fin portions on isolation regions of the semiconductor substrate, wherein the semiconductor fin portions are in direct contact with the dielectric fin portions and the semiconductor fin portions and the dielectric fin portions have a same height, wherein the semiconductor fin portions and the dielectric fin portions have a same width, the dielectric fin portions being present entirely filling fin trenches that are present in the isolation regions;
a gate structure present on a channel region portion of the composite fin structure; and
epitaxial source and drain regions on the source and drain region portions of the composite fin structure, wherein the semiconductor fin portions of the composite fin structure have a same width as the dielectric fin portions of the composite fin structure.
10. The semiconductor device of claim 9 , wherein the semiconductor fin portions are comprised of a semiconductor material selected from the group consisting of silicon (Si), germanium (Ge), silicon germanium (SiGe), silicon doped with carbon (Si:C), type III-V semiconductors and combinations thereof.
11. The semiconductor device of claim 9 , wherein the dielectric fin portions are comprised of a dielectric selected from the group consisting of silicon oxide, silicon oxynitride, aluminum oxide, hafnium oxide, silicon boron carbon nitride, and combinations thereof.
12. The semiconductor device of claim 9 , wherein the epitaxial source and drain regions are merged source and drain regions extending into contact with the source and drain fin portions of adjacent fin structures.
13. The semiconductor device of claim 9 , wherein the epitaxial source and drain regions are comprised a semiconductor material selected from the group consisting of silicon (Si), germanium (Ge), silicon germanium (SiGe), silicon doped with carbon (Si:C), type III-V semiconductors and combinations thereof.
14. The semiconductor device of claim 9 , wherein the semiconductor device is an n-type fin field effect transistor.
15. The semiconductor device of claim 9 , wherein the semiconductor device is a p-type fin field effect transistor.
16. A semiconductor device comprising:
a composite fin structure including semiconductor fin portions on an active device region of a semiconductor substrate and dielectric fin portions on isolation regions of the semiconductor substrate, wherein the semiconductor fin portions are in direct contact with the dielectric fin portions, wherein portions and the semiconductor fin portions and the dielectric fin portions have a same height, and the isolation regions are comprised of dielectric filled trench isolation regions, the dielectric fin portions being present filling fin trenches that are present in the isolation regions;
a gate structure present on a channel region portion of the composite fin structure; and
epitaxial source and drain regions on the source and drain region portions of the composite fin structure, wherein the semiconductor fin portions of the composite fin structure have a same width as the dielectric fin portions of the composite fin structure.
17. The semiconductor device of claim 16 , wherein the semiconductor fin portions are comprised of a semiconductor material selected from the group consisting of silicon (Si), germanium (Ge), silicon germanium (SiGe), silicon doped with carbon (Si:C), type III-V semiconductors and combinations thereof.
18. The semiconductor device of claim 16 , wherein the dielectric fin portions are comprised of a dielectric selected from the group consisting of silicon oxide, silicon oxynitride, aluminum oxide, hafnium oxide, silicon boron carbon nitride, and combinations thereof.